SEM/EDS快速检测分散在预涂层中的纳米SiO2  

Rapid detection of nano-SiO2 dispersed in primer by SEM/EDS

作　　者：陈佳阳[1] 陈耀文 CHEN Jia-yang;CHEN Yao-wen(Central Laboratory,Shantou University,Shantou Guangdong 515000,China)

机构地区：[1]汕头大学中心实验室,广东汕头515000

出　　处：《电子显微学报》2020年第2期214-217,共4页Journal of Chinese Electron Microscopy Society

摘　　要：本文利用扫描电子显微镜与能谱仪结合(SEM/EDS),通过改变加速电压和光阑直径,成功地检测到分散在预涂层中直径约100 nm的SiO2颗粒。实验结果表明:光阑直径大小对纳米颗粒能谱分析空间分辨力的影响大于加速电压,当加速电压为5 kV,光阑直径为20μm时得到的检测结果最为合理。In this paper,scanning electron microscope(SEM)and energy spectrometer(EDS)were used to detect star-like nano-SiO2 particle dispersed in the primer by changing the accelerating voltage and aperture diameter.The experimental results show that the detection result is most reasonable when the accelerating voltage is 5 kV and the diameter of aperture is 20μm.In addition,the influence of aperture diameter on EDS spatial resolution of nanoparticles is greater than that of accelerating voltage.

关 键 词：X射线能谱分析 纳米SIO2 车载触摸屏 

分 类 号：TB332[一般工业技术—材料科学与工程] O657.62[理学—分析化学]