电子探针波谱仪和能谱仪在材料分析中的应用及对比  

The application and comparison of EPMA WDS and EDS in material analysis

作　　者：李明辉[1,2] 郜鲜辉 吴金金[1] 魏慧欣[1] 罗慧倩 宋武林[1,2] LI Ming-hui;GAO Xian-hui;WU Jin-jin;WEI Hui-xin;LUO Hui-qian;SONG Wu-lin(Analytical and Testing Center,Huazhong University of Science and Technology,Wuhan Hubei 430074;School of Materials Science and Engineering,Huazhong University of Science and Technology,Wuhan Hubei 430074,China)

机构地区：[1]华中科技大学分析测试中心,湖北武汉430074 [2]华中科技大学材料科学与工程学院,湖北武汉430074

出　　处：《电子显微学报》2020年第2期218-223,共6页Journal of Chinese Electron Microscopy Society

摘　　要：作为微区分析的有效手段,电子探针(EPMA)在材料成分的定性、定量、线分析以及元素面分布的分析方面等有着广泛的应用。特别是随着技术的不断进步,场发射型电子探针在同时获得高分辨率的图像和精确的成分分析方面有显著的优势,为材料分析提供了更多的可能性。本文以岛津EPMA-8050G型场发射型电子探针在材料分析中的典型应用为例,结合配备的能谱仪附件,对利用电子探针波谱仪和能谱仪进行材料的成分分析进行介绍和对比。另外,EPMA-8050G型电子探针配置的背散射电子探测器性能优异,能够初步观察材料的晶粒取向信息,可以用来分析和判断EBSD样品的前期制样效果,进一步扩展了电子探针在材料分析方面的应用。As an effective method of micro-area analysis,Electron Probe Micro-Analyzer(EPMA)has been widely used in qualitative analysis,quantitative analysis,line scanning and mapping analysis of material compositions.Especially with the development of technology,the field emission EPMA has significant advantages in obtaining high-resolution images and accurate compositions,which provides more possibilities for material analysis.In this paper,the typical application of Shimazu EPMA-8050 G field emission electron probe micro-analyzer is taken as an example in material analysis.Combined with the Energy Dispersive Spectrometer(EDS),electron probe spectrometer and energy spectrometer were used to analyze the composition of the materials,and the differences between the two methods were compared.In addition,the EPMA-8050 G is equipped with a backscattering electron detector with excellent performance.It can preliminarily observe the grain orientation of the material,and can be used to analyze and estimate the preliminary sample preparation of EBSD specimen.This further expands the application of the EPMA in material analysis.

关 键 词：场发射电子探针 波谱仪 能谱仪 成分分析 晶粒取向 

分 类 号：P575.1[天文地球—矿物学] O657.61[天文地球—地质学]