大口径大视场望远镜探测器平面度检测方法综述  

Overview of CCDs flatness test method for large aperture and wide-field telescope

作　　者：郭宁馨 张景旭[1] 刘昌华[1] 陈涛[1] 安其昌[1] 明名[1] GUO Ning-xin;ZHANG Jing-xu;LIU Chang-hua;CHEN Tao;AN Qi-chang;MING ming(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Science,Changchun 130033,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《激光与红外》2020年第4期387-395,共9页Laser & Infrared

基　　金：国家自然科学基金项目(No.11703026,No.11803034);白求恩医学工程与仪器中心基金项目(No.BQEGCZX2019042)资助。

摘　　要：为了更好地适应大口径大视场望远镜的成像要求,在相机焦平面拼接多个CCD使其能够覆盖望远镜的全视场成为大口径大视场望远镜光学相机设计的重点。本文系统地总结了当前国内外探测器平面度测量方法的最新研究进展,对比了应用较广的扫描白光干涉仪、三角激光测量仪以及激光同轴位移器的特点。文章还结合了国外大口径大视场望远镜中的相机焦平面靶面拼接特点,对其测量方法及设备进行了详细介绍和总结分析,为大口径大视场地基光电望远镜焦平面拼接探测器的平面度测量提供一定的经验参考。In order to better adapt to the imaging requirements of large aperture and wide-field of view telescope,the combination of multiple CCDs in the focal plane of camera makes it possible to cover the full field of view of the telescope.In this paper,the latest research progress of target plane flatness measurement methods at home and abroad is summarized systematically,and the characteristics of scanning white light interferometer,triangle laser measuring instrument and laser coaxial displacer,which are widely used,are compared.This paper also introduces and summarizes the measurement methods and equipment of the focal plane target splicing characteristics of large aperture and wild-field of view telescopes abroad,and provides some experience for the flatness measurement of the focal plane splicing target surface of large aperture and wild-field of view telescopes.

关 键 词：CCD 平面度 测量仪器 大口径大视场地基光电望远镜 

分 类 号：TH751[机械工程—仪器科学与技术]