基于柱面微透镜阵列的激光匀化系统设计及实验研究  

Design and experimental investigations of laser homogenization system based on cylindrical microlens array

作　　者：周叶 祝启欣 黄中亚 骆崛魁 李成 ZHOU Ye;ZHU Qi-xin;HUANG Zhong-ya;LUO Jue-kui;LI Cheng(Wuhan Raycus Fiber Laser Technologies Co.,Ltd.,Wuhan 430075,China)

机构地区：[1]武汉锐科光纤激光技术股份有限公司,湖北武汉430075

出　　处：《激光与红外》2020年第4期486-492,共7页Laser & Infrared

基　　金：国家重点研发计划项目(No.2016YFB1102700)资助。

摘　　要：为了获得平顶分布的长度连续可调的线光斑,设计了一种基于柱面微透镜阵列的光束整形系统,该系统采用两个相同的柱面微透镜阵列串联在一起,通过傅里叶透镜的聚焦作用在像平面上形成均匀的线光斑。基于矩阵光学理论,建立了成像光线矩阵,分析了影响光斑长度相关因素;基于傅里叶光学,进一步建立了光场数学模型,通过数值分析方法,模拟了光强分布特性。搭建了实验系统,获得了平顶分布的均匀线光斑,光斑长度在2~34 mm范围内连续可调,这种长度连续可调的线光斑在激光应用领域具有重要的应用价值,可以更好地满足实际生产需求。In order to obtain linear spot that the length can be adjusted continuously,a beam shaping system based on cylindrical microlens array has been designed,which uses two identical cylindrical microlens arrays connected in series,to form uniform linear spot on the image plane through the focusing of Fourier lens.Based on the theory of matrix optics,the imaging ray matrix has been established,and the related factors affecting the spot length have been analyzed.Based on Fourier optics,the mathematical model of light field has been established,and the light intensity distribution characteristics are simulated by numerical analysis method.An experimental system has been built and obtained uniform line spot with flat top distribution,the length of the spot can be continuously adjusted in the range of 2~34 mm.This linear spot with continuously adjustable length has important application value in the field of laser application and can better meet the requirement of actual production.

关 键 词：光束整形 柱面微透镜阵列 矩阵光学 傅里叶光学 线光斑 

分 类 号：TN203[电子电信—物理电子学]