基于点扫描的同步辐射红外三维谱学显微研究  

Synchrotron Radiation Infrared Three-Dimensional Microspectroscopy Based on Point Scanning Method

作　　者：林乐诚 佟亚军 吉特[1,3] 彭蔚蔚 肖体乔[1,3] 朱化春 陈敏[1,3] Lin Yuecheng;Tong Yajun;Ji Te;Peng Weiwei;Xiao Tiqiao;Zhu Huachun;Chen Min(Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Shanghai 201800,China;Shanghai Tech University,Shanghai 201210,China;Shanghai Synchrotron Radiation Facility,Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201204,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海应用物理研究所,上海201800 [2]上海科技大学,上海201210 [3]中国科学院上海高等研究院上海光源,上海201204 [4]中国科学院大学,北京100049

出　　处：《光学学报》2020年第3期207-213,共7页Acta Optica Sinica

基　　金：国家自然科学基金青年科学基金(11605281);国家自然科学基金(11475252)。

摘　　要：同步辐射红外(SRIR)光具有光谱范围宽、发散角小、亮度高以及信噪比高等优点,结合传统红外谱学技术,采用SRIR谱学显微技术对样品进行红外谱学显微,可以获得样品微米级别的空间光谱信息。利用MiTeGen聚亚酰胺小环作为样品,以上海光源BL01B1线站的SRIR光为光源,通过点扫描采样方式进行同步辐射红外三维谱学显微实验研究。通过获得聚亚酰胺小环在不同角度下的SRIR二维显微光谱信息,选取波数范围为1495~1485 cm-1的显微光谱信息处理,用代数迭代算法对聚亚酰胺小环的化学组分酰胺Ⅱ进行SRIR三维显微重构,获得了完整的三维重构图。实验表明本文方法能够以较高的信噪比重构出样品化学组分的三维红外显微结构。Synchrotron radiation infrared(SRIR)light has the advantages of wide spectral range,small divergence angle,high brightness,and high signal-to-noise ratio.Combined with traditional infrared spectroscopy technology,SRIR microspectroscopy technology is used in infrared spectroscopy microscopy for samples,and the micron-level spatial spectral information of samples can be obtained.By taking an MiTeGen polyimide loop as the sample and using SRIR light from line station BL01 B1 of Shanghai synchrotron radiation facility as the light source,we perform the synchrotron radiation infrared three-dimensional(3 D)microspectroscopy experiments based on point scanning method.The two-dimensional microspectral information of the MiTeGen polyimide loop under different angles is collected based on point scanning method.The microspectral information in the wavenumber range of 1495--1485 cm-1 is selected,SRIR 3 D microscopic reconstruction is performed by using algebraic iteration algorithm for the amideⅡchemical component of the polyimide ring,and a whole 3 D reconstruction image is obtained.The research shows that this method can reconstruct the 3 D infrared microscopic structure of the sample′s chemical components with a high signal-to-noise ratio.

关 键 词：X射线光学 同步辐射 三维谱学显微 高分辨率光谱学 断层图像处理 

分 类 号：O433.1[机械工程—光学工程]