微细电解加工中空电极侧壁绝缘层的制备工艺研究  

Preparing Hollow-electrode Sidewall-insulating Film Through Electrochemically Machining Micro-holes

作　　者：温杰超 孔全存[1,2] 刘桂礼[1] 牛献礼 田元波 Wen Jiechao;Kong Quancun;Liu Guili;Niu Xianli;Tian Yuanbo(School of Instrumentation Science and Opto-Electronics Engineering,Beijing Information Science and Technology University,Beijing 100192,China;Institute of Precision Measuring Technology and Instruments,Beijing Information Science&Technology University,Beijing 100192,China)

机构地区：[1]北京信息科技大学仪器科学与光电工程学院,北京100192 [2]北京信息科技大学精密测量技术与仪器研究所,北京100192

出　　处：《机械科学与技术》2020年第3期411-418,共8页Mechanical Science and Technology for Aerospace Engineering

基　　金：国家自然科学基金面上项目(51675054);北京市自然科学基金项目(3172013);北京市教委科技发展计划面上项目(KM201711232005)资助。

摘　　要：针对孔径100~200μm高深宽比微细孔电解加工中,电极侧壁绝缘层在电解液冲击和气泡撕裂中易损伤/脱落等问题,本文提出一种丙烯酸环氧树脂电泳法的中空电极侧壁绝缘制备工艺。通过优化工艺参数并开展加工实验,比较加工孔尺寸及形貌、加工后电极表面形态,结果表明丙烯酸环氧树脂电泳法制备的中空电极侧壁绝缘层,具有较高的致密性、均匀性、耐久性和一致性。最后,在500μm厚304不锈钢片上加工出入口180.6μm、出口173.8μm、深宽比约为3的微细阵列孔,其锥度比非侧壁绝缘电极加工的孔减少了约70%以上,基本为直孔,可满足实际需求,进而验证了本方法的应用可行性。To electrochemically machine(ECM)a high-aspect-ratio micro-hole with the diameter of 100~200μm and to reduce the easy fracture or falling off of the sidewall-insulating film on hollow electrode,a novel method of hollow-electrode sidewall-insulating preparation of micro-hole using the acrylic epoxy resin electrophoresis method was proposed.The process parameters were optimized;the machining experiments were carried out;the size and morphology of the machined hole and the machined electrode surface were compared.The results show that the sidewall-insulating film prepared with the acrylic epoxy resin electrophoresis method is highly compact and has uniformity,durability and consistency.Finally,the hollow-electrode sidewall-insulating film was prepared with the above-mentioned method.A high-aspect-ratio micro-hole array was machined on a stainless 304 steel plate with the thickness of 500μm.The diameters of a typical micro-hole at its inlet and outlet are 180.6μm and 173.8μm,respectively,and the taper of the micro-hole is about 70%lower than that of the hollow-electrode non-sidewall-insulating film.Moreover,the micro-holes are basically straight.

关 键 词：微细电解加工 中空电极 侧壁绝缘 丙烯酸环氧树脂 电泳 微细孔 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]