微型紫外光谱仪分析系统的研究  

Micro-Ultraviolet Spectrometer Analysis System

作　　者：黄良坤 温泉[1,2] 温志渝[1,2] 庾繁 刘海涛[2] 洪明坚[2] 谢瑛珂[1,2] Huang Liangkun;Wen Quan;Wen Zhiyu;Yu Fan;Liu Haitao;Hong Mingjian;Xie Yingke(Key Laboratory of Fundamental Science of Micro/Nano-Deviceand System Technology,Chongqing University,Chongqing 400044,China;Microsystem Research Center,Chongqing University,Chongqing 400044,China)

机构地区：[1]重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆400044 [2]重庆大学微系统研究中心,重庆400044

出　　处：《激光与光电子学进展》2020年第5期264-270,共7页Laser & Optoelectronics Progress

基　　金：国家重点研发计划(2018YFF01011200);国家自然科学基金(61327002);中央高校基本科研业务费专项(2019CDCG0007)。

摘　　要：针对微型紫外光谱仪应用设计要求,开展了紫外光谱仪系统研究,完成了Ⅳ型光学系统设计。研制出在线实时分析的微型紫外光谱仪,对样机主要参数的测试表明:其工作波长为200~400nm,分辨率达0.31nm,波长准确性为±0.1nm,信噪比为507∶1。通过12h系统稳定性测试,结果表明该样机光谱波动小于0.47%,达到了光谱仪长期工作的稳定性要求。在25℃的实验条件下通过SO2气体对光谱仪性能进行测试,基于差分吸收光谱技术理论,完成了标准气体的差分吸收截面计算。通过连续24h对质量浓度为20~100mg/m3的SO2进行测试,结果表明光谱仪测试数据反演质量浓度的波动性小于1%,线性误差小于0.6%,最大示值误差为-0.56mg/m^3。In this study,a micro-ultraviolet spectrometer with anⅣ-type optical system is designed,fabricated,and analyzed.The micro-ultraviolet spectrometer is effectively validated for online real-time analysis applications.The main parameters of the prototype include a wavelength range of 200--400 nm,resolution of 0.31 nm,wavelength accuracy of±0.1 nm,and a signal-to-noise ratio of 507···1.The experimental results of a 12-h system stability test suggest that the spectral fluctuation is less than 0.47%,confirming the long-term stability of the spectrometer.Finally,the performance of the spectrometer is verified by measuring SO2 gas at 25℃.Based on the theory of differential absorption spectroscopy,a differential absorption cross section calculation of a standard gas is performed.The test results show that the inversion mass concentration of the spectrometer test data has a fluctuation of less than 1%,linearity error of less than 0.6%,and maximum indication error of-0.56 mg/m^3 upon testing an SO2 mass concentration of 20-100 mg/m3 for 24 h.

关 键 词：光谱学 紫外光谱仪 Ⅳ型光学系统设计 差分吸收光谱技术 SO2 

分 类 号：TH744.1[机械工程—光学工程]