平面平晶局部平面度校准的探讨  

Discussion on Local Planarity Calibration of Planar Optical Flat

作　　者：王海涟 WANG Hailian

机构地区：[1]苏州市计量测试院,江苏苏州215128

出　　处：《计量与测试技术》2020年第4期86-88,共3页Metrology & Measurement Technique

摘　　要：文章介绍了用平面平晶校准量块工作面平面度的方法,根据校准原理提出局部平面度校准来提高被测量面平面度校准的精度,并对平面平晶的局部校准提出了新的建议。This paper introduces the method of calibrating the flatness of the working face of the Gauge block with Planar optical flat,proposes the local flatness calibration according to the calibration principle to improve the accuracy of the flatness calibration of the measured surface,and puts forward a new Suggestion for the local flatness calibration of the Planar optical flat.

关 键 词：平面平晶 等厚干渉 局部平面度校准 

分 类 号：TB9[一般工业技术—计量学]