1.25m口径宽波段测试设备设计  

The Opto-Mechanical Structure Design of 1.25Meter Wide Band Detection Device

作　　者：李盛林 韩光宇 卢惠琴 刘希财 LI Sheng-lin;HAN Guang-yu;LU Hui-qin;LIU Xi-cai(State Key Laboratory of Laser Interaction with Matter,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Jilin Changchun130033,China;University of Chinese Academy of Sciences,Beijing 100039,China;CAS Nanjing Astronomical Instruments Company Limited,Jiangsu Nanjing210042,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所激光与物质相互作用国家重点实验室,吉林长春130033 [2]中国科学院大学,北京100039 [3]南京中科天文仪器有限公司,江苏南京210042

出　　处：《机械设计与制造》2020年第5期111-115,共5页Machinery Design & Manufacture

摘　　要：多光轴一致性是衡量多光轴系统性能的一项重要技术指标。在研制某多光轴光测设备中,为提高测试精度,需要研制一台以口径1.25m,焦距15000mm的平行光管为主体的检测设备。对检测系统的组成和原理做了简单介绍;针对设计要求,提出了侧面柔性钢带支撑和杠杆平衡重锤的组合浮动支撑方式来解决主镜受重力影响而带来的面形问题;对支撑点个数,位置及重锤重量等参数进行优化,以达到最优的面形精度;确定了次镜室及三翼梁的结构;设计焦面水冷方案抑制辐射杂散光;利用接触非线性方法对主镜在重力作用对的面形精度进行了分析拟合结果为11.19nm(λ/56);最后,利用4D动态干涉仪对已完成的平行光管进行检测,其系统面形精度RMS达到了35.05nm(λ/18),实验结果表明,反射镜支撑结构以及整个系统的设计均达到了设计要求。Multi-axes parallelism is an important technical indicators in measuring system performance of multi-axes system.In the project that a measurement device is developed,a wild band detection device which has a 1250 mm aperture and 15000 mm focal length is needed in order to improve the measurement accuracy. The composition and principle of the detection system are briefly introduced. According to the index requirements,a combination of floating primary mirror support solution which consists of the steel belt and the back of balance weight is proposed to solve the problem of surface figure influenced by gravity. In order to get the best surface figure,the support positions,the number of support points and the balance weight were optimized. The structures of the secondary mirrorsupport and three-beam were designed. A water cooling solution for focus plane is used for suppressing the potential radiated stray light.A non-linear contact method was applied to analysis the surface figure of primary mirror influenced by gravity. The result is 11.19 nm(λ/56). The test to completed collimator was made by 4 D dynamic interferometer and it shows that the optical system surface figure reached to λ/18 and other indexes met their requirements.

关 键 词：多光轴一致性 大口径平行光管 主镜支撑 非线性接触 面形精度 

分 类 号：TH16[机械工程—机械制造及自动化] TN216[电子电信—物理电子学]