水浴对MoS2薄膜结构及摩擦学性能影响的研究  

Structure and Tribological Behaviors of MoS2 Films Treated by Water Bath

作　　者：董春萌 高晓明[1] 余兵 姜栋[1] 胡明[1] 王德生[1] 翁立军[1] 孙嘉奕[1,2] DONG Chunmeng;GAO Xiaoming;YU Bing;JIANG Dong;HU Ming;WANG Desheng;WENG Lijun;SUN Jiayi(State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Gansu Lanzhou 730000,China;University of Chinese Academy of Sciences,Beijing 100049 China;Space Structure and Mechanism Technology Laboratory of China Aerospace Science and Technology Group Co Ltd,Aerospace System Engineering,Shanghai 201109 China)

机构地区：[1]中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000 [2]中国科学院大学,北京100049 [3]航天科技集团有限公司空间结构与机构技术实验室上海宇航系统工程研究所,上海201109

出　　处：《摩擦学学报》2020年第2期166-174,共9页Tribology

基　　金：国家自然科学基金项目(51875551)资助.

摘　　要：为考察水介质对二硫化钼(MoS2)薄膜结构和摩擦学性能的影响,采用沸腾蒸馏水对溅射MoS2薄膜进行水浴处理,并对水浴处理前后薄膜的微观结构、摩擦学性能进行了研究.研究发现,薄膜中同时存在晶体结构和非晶结构.随着水浴处理时间的延长,XRD分析结果中观察到薄膜中非晶相减少,微晶相增加,同时晶粒尺寸先减小后增大.另外,薄膜的枝状晶上产生了更多的细小枝状晶.薄膜中的残余应力也随水浴时间延长而发生明显变化.薄膜的摩擦学性能受到水浴的明显影响,当水浴处理时间为20 min时,MoS2薄膜的耐磨寿命达到未水浴处理薄膜的约2倍.分析认为,水浴处理导致溅射MoS2薄膜内应力、组织结构和晶体结构的变化,引起了其摩擦学性能的变化.In order to investigate the effect of aqueous medium treatment on the structure and tribological properties of molybdenum disulfide(MoS2)film,the sputtered MoS2 film was treated by boiling water.A series of studies on the microstructure,tribology properties of the films before and after water bath were carried out.It was found that the longer the water bath time,the less amorphous,the more microcrystals.Additionally,the grain size decreased firstly and then increased.The film produced small dendrites on the big dendrites after being treated by water bath,and the treatment increased the density and wear life.The stress in the MoS2 film also increased firstly and then decreased along with the boiling time.When the film was kept in the water bath for 20 minutes,the wear life was twice as that of the untreated MoS2 film.As a consequence,the water bath treatment caused a change in the stress of the sputtered MoS2 film.The wear behavior was discussed on basis of film microstructure.

关 键 词：溅射MoS2薄膜 水浴 结构 耐磨寿命 

分 类 号：TH117.3[机械工程—机械设计及理论]