Fe73.5Cu1Nb3Si13.5B9非晶合金薄膜压磁效应的特征及负压磁效应  

Piezomagnetic Properties and Negative Piezomagnetic Effect of Fe73.5Cu1Nb3Si13.5B9 Amorphous Alloy Films

作　　者：陈杰[1] 朱正吼[1] 林前英 白茹茹 赵辉[2] Chen Jie;Zhu Zhenghou;Lin Qianying;Bai Ruru;Zhao Hui(School of Materials Science&Engineering,Nanchang University,Nanchang 330031,China;Institute of Space Science and Technology,Nanchang University,Nanchang 330031,China)

机构地区：[1]南昌大学材料科学与工程学院,江西南昌330031 [2]南昌大学空间与技术研究院,江西南昌330031

出　　处：《稀有金属材料与工程》2020年第4期1204-1210,共7页Rare Metal Materials and Engineering

基　　金：National Natural Science foundation of China(61361008);Science and Technology Support Program of Jiangxi,China(12004532)。

摘　　要：以Fe73.5Cu1Nb3Si13.5B9非晶合金薄膜作为研究对象,研究了其压磁效应的特征及其负压磁效应现象。结果表明,淬态下的Fe73.5Cu1Nb3Si13.5B9非晶合金薄膜在0~0.66 kPa压力带具有显著的正压磁效应,随着压应力增大,薄膜电感值下降。当压应力σ=0.66 kPa时,压磁效应值SI达到5.5%;环境温度对压磁效应灵敏度有影响,在20~30℃范围内,压磁效应和灵敏度稳定性最好,随着环境温度升高,薄膜灵敏度和压磁效应值均降低;薄膜经过退火处理后,薄膜内应力状态会发生变化,当退火温度≥350℃时,薄膜的压磁效应类型由"正压磁效应"转变为"负压磁效应",且随着薄膜中内应力降低,|SI|值下降,且薄膜的压磁效应受环境温度影响减小。当退火温度为555℃,σ=0.44 kPa时,|SI|值仅为0.59%;当退火温度达到薄膜的晶化温度时,薄膜的压磁效应受环境温度影响最小。The piezomagnetic properties and negative piezomagnetic effect in Fe73.5Cu1Nb3Si13.5B9 amorphous alloy films were investigated.The results show that the Fe73.5Cu1Nb3Si13.5B9 amorphous alloy film has a significant positive piezomagnetic property in its quenched state.Furthermore,the inductance of the alloy film decreases substantially in the 0~0.66 kPa pressure range,whereas the compressive stress,σ,increases.Whenσ=0.66 kPa,the piezomagnetic effect value,SI,reaches 5.5%.The ambient temperature has a significant influence on the sensitivity of the piezomagnetic property.The films show the optimal piezomagnetic properties and sensitivity stability in the temperature range of 20~30℃.Increase in ambient temperature leads to decrease in the piezomagnetic property and sensitivity values,and the inner stress state of the film changes after annealing treatment.At an annealing temperature of 350℃,the piezomagnetic effect of the film changes from"positive"to"negative".Furthermore,as the internal stress decreases,the value of|SI|decreases,and the piezomagnetic property of the film becomes less sensitive to the change in ambient temperature.At an annealing temperature of 555℃,the value of|SI|is 0.59%(σ=0.44 kP a).When the annealing temperature reaches the crystallization temperature,the piezomagnetic property of the film becomes less sensitive to the changes in ambient temperature.

关 键 词：非晶合金薄膜 压磁效应 内应力 

分 类 号：TB383.2[一般工业技术—材料科学与工程] TG139.8[金属学及工艺—合金]