双轴电热机械MEMS微镜的驱动臂交叉耦合模型  

Actuator cross-axis coupling model of two-axis electrothermalmechanical MEMS mirror

作　　者：杨亮亮 胡斌 李剑敏[2] YANG Liangliang;HU Bin;LI Jianmin(Zhejiang Provincial Key Lab of Modern Textile Machinery&Technology,Zhejiang Sci-Tech University,Hangzhou 310018,China;Faculty of Mechanical Engineering&Automation,Zhejiang Sci-Tech University,Hangzhou 310018,China;WiO Technology Co.,Ltd.,Wuxi 214000,China)

机构地区：[1]浙江理工大学浙江省现代纺织装备技术重点实验室,杭州310018 [2]浙江理工大学机械与自动控制学院,杭州310018 [3]无锡微奥科技有限公司,江苏无锡214000

出　　处：《浙江理工大学学报（自然科学版）》2020年第3期349-355,共7页Journal of Zhejiang Sci-Tech University(Natural Sciences)

基　　金：国家重点研发计划(2017YFB1304000);浙江省自然科学基金项目(LY18E050016)。

摘　　要：根据双轴电热机械MEMS微镜的热力学、机械振动、频率响应和光学动态扫描图形分析,考虑驱动臂轴间交叉耦合情况,建立了双轴电热机械MEMS微镜的驱动臂交叉耦合模型。通过Matlab/Simulink对微镜系统模型进行仿真,并模拟了双轴电热机械MEMS微镜单个驱动臂和两个驱动臂的光学动态扫描模式。将仿真图形与双轴电热机械MEMS微镜动态扫描的实际情况进行对比,结果表明该模型有效仿真出双轴电热机械MEMS微镜的光学动态扫描模式,达到预测该微镜光学动态扫描图形的目的。According to the thermodynamics, mechanical vibration, frequency response and optical dynamic scanning pattern analysis of the two-axis electrothermalmechanical MEMS(micro electro mechanical system) mirror, the actuator cross-axis coupling model of the two-axis electrothermalmechanical MEMS mirror is established, in view of the cross-axis coupling. The MEMS mirror system model is simulated by Matlab/Simulink, and the optical dynamic scanning mode of a single actuator and two actuators of the two-axis electrothermalmechanical MEMS mirror is simulated. The simulation results are compared with the actual situation of dynamic scanning of two-axis electrothermalmechanical MEMS mirror. The results show that the model effectively simulates the optical dynamic scanning mode of the two-axis electrothermalmechanical MEMS mirror, which reaches the purpose of predicting the optical dynamic scanning pattern of the MEMS mirror.

关 键 词：MEMS微镜 电热驱动 交叉耦合 电热机械建模 

分 类 号：TP215[自动化与计算机技术—检测技术与自动化装置]