新型量子霍尔电阻样品计量应用研究  

Research in Measurement and Application of New Type Quantum Hall Resistance Sample

作　　者：蔡建臻[1] 黄晓钉[1] 潘攀[1] CAI Jian-zhen;HUANG Xiao-ding;PAN Pan(Beijing Orient Institute of Measurement and Test,Beijing 100086,China)

机构地区：[1]北京东方计量测试研究所,北京100086

出　　处：《计量学报》2020年第4期484-488,共5页Acta Metrologica Sinica

基　　金：国家国防科技工业局“十二五”技术基础项目(JSJL201403A009);航天五院杰出青年人才基金。

摘　　要：采用AsGa砷化镓系材料研制了多种结构的新型量子霍尔电阻样品,介绍了该样品的特点及应用领域。使用常温电流比较仪和低温电流比较仪,用过渡比对法对新型的量子霍尔电阻与标准量子霍尔电阻样品进行了双重测量比对验证,在实验室内测量结果的相对偏差小于4×10^-8,验证了新型的量子霍尔电阻样品和测量系统的准确度满足当前计量应用需求。A new type Quantum Hall resistance(NQHR)sample of AsGa epitaxial wafer was developed.The NQHR sample has multi structures.The characters and application area were introduced.The NQHR sample was compared with standard Quantum Hall resistance(QHR)sample using transition comparison measurement method.In laboratory,the measured valve deviation between the two kinds of sample is less than 4×10^-8.The experiment proved that the accuracy of NQHR sample and metrology system could satisfy the application of QHR Standard in resistance metrology.

关 键 词：计量学 量子霍尔电阻 过渡比对法 常温电流比较仪 不确定度 

分 类 号：TB971[一般工业技术—计量学]