基于原子力显微镜的石墨烯表面图案化摩擦调控  

Controllable nano-friction of graphene surface by fabricating nanoscale patterning based on atomic force microscopy

作　　者：张玉响 彭倚天 郎浩杰 Zhang Yu-Xiang;Peng Yi-Tian;Lang Hao-Jie(College of Mechanical Engineering,Donghua University,Shanghai 201620,China)

机构地区：[1]东华大学机械工程学院,上海201620

出　　处：《物理学报》2020年第10期136-144,共9页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:51775105);上海市自然科学基金(批准号:17ZR400700)资助的课题.

摘　　要：摩擦可调控的石墨烯作为固体润滑剂在微/纳机电系统中具有巨大的应用潜力.本文采用导电原子力显微镜对附着在Au/SiO2/Si基底上的石墨烯进行氧化刻蚀,比较了在不同刻蚀参数下石墨烯纳米图案的摩擦性能,并且通过开尔文力显微镜分析了不同刻蚀参数对纳米图案氧化程度的影响.结果表明:施加负偏压可以在石墨烯表面制造出稳定可调的氧化点、线等纳米级图案,氧化点的直径和氧化线的宽度都随着电压的增大而增大;增加石墨烯的厚度可以提高纳米图案的连续性和均匀性.摩擦力随着针尖电压的增大而增大,这是由于电压增大了弯液面力和静电力.利用这些加工的纳米级图案可以精确地调控石墨烯表面的摩擦大小.通过导电原子力显微镜刻蚀技术实现石墨烯表面纳米摩擦特性的可控,为石墨烯在微/纳米机电系统中的摩擦行为研究和具有图案表面的纳米器件的制备提供了新的思路和方法.Friction-controlled graphene has great potential as a solid lubricant in micro/nano electromechanical systems.In this work,the conductive atomic force microscope was used to conduct oxidation etching on the graphene surface to produce different nanoscale patterns.The frictional properties of graphene nanoscale patterns were compared under different etching parameters,and the degree of oxidation of the etching patterns was analyzed by Scanning Kelvin Probe Microscopy.The results indicated that the degree of graphene oxidation can be controlled by changing the tip voltage,load and thickness so that graphene forms stable,adjustable oxidation point,line and nanometer patterns on the Au/SiO2/Si substrate.The diameter of oxidation point and width of oxidation line increased with the increase of voltage.The continuity and uniformity of nanometer patterns was improved by Increasing the thickness of graphene.The friction increased with the increase of tip voltage,which was attributed to the increase of meniscus force and electrostatic force.These nanostructures can precisely regulate nano-friction of graphene surface.The realization of the processing of nanoscale patterns and the adjustment of nano-friction characteristics provides a new idea and method for the study of electrical friction behavior of graphene in micro/nano electromechanical systems and the preparation of nano-devices with patterned surfaces.

关 键 词：石墨烯 氧化刻蚀 纳米摩擦 导电原子力显微镜 

分 类 号：TQ127.11[化学工程—无机化工] TB383.1[一般工业技术—材料科学与工程]