基于Fick扩散理论的气相腐蚀环境氯离子传感器  

Chloride ion sensor for gas phase corrosion environment based on Fick diffusion theory

作　　者：刘喆 曾捷[1,3] 李明 周智[1] 卢李[1] 张旭苹 LIU Zhe;ZENG Jie;LI Ming;ZHOU Zhi;LU Li;ZHANG Xuping(State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;Department of Equipment Service Products,A VIC China Aero-Polytechnology Establishment,Beijing 100028,China;Key Laboratory of Intelligent Optical Sensing and Manipulation,Ministry of Education,Nanjing University,Nanjing 210093,China)

机构地区：[1]南京航空航天大学机械结构力学及控制国家重点实验室,江苏南京210016 [2]中国航空综合技术研究所装备服务产品部,北京100028 [3]南京大学智能光传感与调控技术教育部重点实验室,江苏南京210093

出　　处：《传感器与微系统》2020年第4期66-69,共4页Transducer and Microsystem Technologies

基　　金：航空科学基金资助项目(20170252004);上海航天科技创新基金资助项目(SAST2018-015);国家自然科学基金-联合基金资助项目(U1537102);江苏省重点研发计划产业前瞻与共性关键技术竞争项目(BE2018047)。

摘　　要：根据海洋气相盐雾腐蚀微液膜环境特征,提出了一种基于Fick扩散理论的全固态叉指状氯离子传感器。通过测量电极过渡时间来间接测量微液膜氯离子浓度,并给出了氯离子传感器叉指电极设计规则。该型传感器依次通过溅射、光刻、化学镀膜以及电镀法镀膜等多种工艺制作而成,在0. 1~1 mol/L氯化钠微液膜范围内的校准曲线线性度约为0. 972 5,灵敏度达到2. 38 s1/2/(mol/L),72 h内氯离子浓度测量误差小于4. 2%,呈现良好的稳定性和感知能力。pH值干扰实验结果显示:传感器在pH值2~9范围内测量误差小于7%,表明:该传感器具有较强的抗干扰能力。According to the environmental characteristics of marine vapor salt spray corrosion microfilm,an allsolid-state interdigital chloride ion sensor based on Fick diffusion theory is proposed. The chloride ion concentration of microliquid membrane is indirectly measured by measuring the transition time of the electrode.The design rules of the interdigital electrode of the chloride ion sensor are given. The calibration curve linearity is about 0. 972 5 in the range of 0. 1 ~ 1 mol/L Na Cl micro-liquid film. The sensitivity is 2. 38 s1/2/( mol/L). The error of chloride concentration measurement is less than 4. 2 % in 72 h,showing good stability and sensing ability.The experimental results of pH interference show that the measurement error of the sensor is less than 7 % in the range of pH 2 ~ 9,which indicates that the sensor has strong anti-interference ability.

关 键 词：微液膜腐蚀环境监测 氯离子浓度 Fick扩散定律 全固态叉指状传感器 计时电位法 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]