不锈钢压力传感器芯体研制  

Research and fabrication of stainless steel pressure sensor core

作　　者：盛文军[1] 王志海[1] SHENG Wenjun;WANG Zhihai(The 38th Research Institute of China Electronics Techonlogy Group Corporation,Hefei 230088,China)

机构地区：[1]中国电子科技集团公司第三十八研究所,安徽合肥230088

出　　处：《传感器与微系统》2020年第4期89-91,共3页Transducer and Microsystem Technologies

基　　金：安徽省重点研究与开发计划项目(201904A05020078)。

摘　　要：设计了基于硅应变片的不锈钢压力传感器芯体,作为压力敏感单元的不锈钢基体是基于机械加工工艺的一体结构,无焊缝,无橡胶圈,完全无工作介质泄露风险,同时利用高灵敏度的硅应变片将不锈钢敏感单元形变转换为电信号。通过搭建的测试系统,传感器芯体输出线性度最优达到0. 32%左右,性能指标优良。本传感器芯体经组装成为压力传感器,可以广泛应用于汽车电子和工业电子等各种场合,包括各种不锈钢兼容的腐蚀性介质环境。A stainless steel pressure sensor core based on silicon strain gauge is designed. The stainless steel matrix as pressure sensitive unit is an integrated structure based on mechanical processing technology,which has no welding seam,no rubber ring and no leakage risk of working medium. At the same time,silicon strain gauge with high sensitivity is used to transform deformation of stainless steel sensitive unit into electrical signals. Through the built test system,the output linearity of the sensor core reaches about 0. 32 % and the performance index is excellent. The core is assembled into pressure sensor,which is widely used in various fields such as automotive electronics and industrial electronics,including various stainless steel compatible corrosive media environment.

关 键 词：不锈钢压力传感器 硅应变片 不锈钢薄膜 压力检测 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]