大口径光学非球面超精密磨削装备与技术  

Ultra-Precision Grinding Equipment and Technology for Large-Size Optical Aspheric Surface Components

作　　者：陈登铃 彭云峰 王振忠 毕果 杨平 杨炜 施晨淳 郭志光 CHEN Dengling;PENG Yunfeng;WANG Zhenzhong;BI Guo;YANG Ping;YANG Wei;SHI Chenchun;GUO Zhiguang(School of Aerospace Engineering,Xiamen University,Xiamen 361102,China)

机构地区：[1]厦门大学航空航天学院,厦门361102

出　　处：《航空制造技术》2020年第8期46-53,共8页Aeronautical Manufacturing Technology

基　　金：国家科技重大专项(2017ZX04022001-207)。

摘　　要：针对大口径光学元件的超精密加工需求,在自主开发的MK7160和2MK1760两台平面磨床的研制基础上,进一步研发了高精度平面磨床UPG80。与现有大多数大口径平面磨床及MK7160、2MK1760磨床相比,UPG80应用了更先进的关键配套工艺技术,包含液体静压支承技术、砂轮修整技术及智能监测系统等。同时,对磨床UPG80的静态精度进行了检测,建立了三坐标轴误差模型对磨床进行误差补偿。在此基础上,采用金刚石圆弧砂轮对530mm×530mm口径的光学非球面元件进行加工,获得了良好的加工效果,验证了磨床的可靠性。To meet the demand of ultra-precision machining for large-size optical components, the research group further developed high-precision surface grinder UPG80 on the basis of the two self-developed grinders, MK7160 and 2MK1760. Compared with most existing large-caliber surface grinders and MK7160, 2MK1760 grinders, UPG80 used more advanced key supporting technology, including hydrostatic support technology, grinding wheel dressing technology and intelligent monitoring system. In this paper, the static accuracy of UPG80 grinder was tested, and a three-axis error model was established to compensate the error of the grinder. On this basis, the optical components with 530 mm×530 mm diameter were machined by diamond circular arc grinding wheel, and good processing effect was obtained, which verifies the reliability of the grinder.

关 键 词：大口径光学元件 超精密磨削 静压导轨 砂轮修整 监测系统 

分 类 号：TH74[机械工程—光学工程]