厚膜氢气传感器设计  

Design of thick film hydrogen sensor

作　　者：文吉延 刘玺 刘志远 刘洋 周明军 金鹏飞 WEN Jiyan;LIU Xi;LIU Zhiyuan;LIU Yang;ZHOU Mingjun;JIN Pengfei(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150001,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2020年第6期92-94,共3页Transducer and Microsystem Technologies

摘　　要：报道了一种基于厚膜工艺的氢气传感器。首先采用丝网印刷工艺制作铂加热器线条,再在其上面分别覆有纳米催化剂/氧化铝形成气敏元件、涂覆纳米氧化铝构成补偿元件,最后制成氢气传感器。测试结果表明:传感器灵敏度大于21 m V/1%H2,响应时间小于30 s,非线性和重复性优于2%。A hydrogen sensor based on thick film process is reported. Firstly,Platinum heater lines are made by screen printing process,then it is coated with nano-catalyst/alumina to form gas sensitive element and coated with nano-alumina to form compensation element,respectively. Finally,hydrogen sensor are made. The test results show that the sensitivity of the sensor is greater than 21 m V/1% H2,the response time is less than 30 s,both the nonlinearity and repeatability are prior to 2 %.

关 键 词：厚膜 氢气传感器 丝网印刷工艺 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]