氧分压对PLD法生长Bi:YIG薄膜结构性能的影响  

Effect of Oxygen Partial Pressure on the Structure and Properties of Bi:YIG Films Grown by PLD

作　　者：王娟娟 WANG Juan-juan(Department of Chemistry and Chemical Engineering,Luliang University,Lishi Shanxi 033001,China)

机构地区：[1]吕梁学院化学化工系,山西离石033001

出　　处：《吕梁学院学报》2020年第2期47-49,共3页Journal of Lyuiang University

摘　　要：钇铁石榴石(YIG)磁光纳米薄膜由于其独特的磁光性能,在光隔离器方面有很广泛的应用前景.鉴于YIG在使用中磁光性能较弱的局限性,采用脉冲激光淀积PLD法,在硅基底上单步淀积生长了Bi掺杂的Bi1.5Y1.5Fe5O12纳米磁光薄膜,从而可以改善YIG在磁光性能方面的不足.生长过程中,通过控制恒定温度300℃,氧分压分别设定为10mTorr,40mTorr,100mTorr下对淀积薄膜的物相结构进行了表征,发现氧分压太高时,生不成石榴石相;对低氧分压下生成的石榴石相结构的晶格常数和晶粒尺寸进行了对比,发现生长的晶体质量有明显的研究意义.Because of its unique magneto-optical properties,yttrium iron garnet(YIG)magneto-optical nanofilms have a wide range of applications in optical isolators.In view of the limitation of the weak magneto-optical performance of YIG in use,pulsed laser deposition PLD method was used to deposit and grow Bi-doped Bi1.5Y1.5Fe5O12 nano-magneto-optical film on a silicon substrate in a single step,thereby improving YIG deficiencies in magneto-optical performance.During the growth process,the phase structure of the deposited film was characterized by controlling the constant temperature of 300℃ and the oxygen partial pressure at 10mTorr,40mTorr,and 100mTorr respectively.It was found that when the oxygen partial pressure was too high,no garnet phase was formed;the lattice constant and grain size of the garnet phase structure generated under low oxygen partial pressure were compared,and it was found that the quality of the grown crystals has obvious research significance.

关 键 词：Bi1.5Y1.5Fe5O12纳米磁光薄膜 氧分压 物相结构 

分 类 号：TM2773[一般工业技术—材料科学与工程]