Ni0.25Zn0.15Fe2.6O4种子层对NiZn铁氧体双层膜性能的影响  

Effect of Ni0.25Zn0.15Fe2.6O4 seed layer on the properties of NiZn ferrite bilayer films

作　　者：闫妍 孙科 杨长龙[2] 王炜 郭荣迪 蒋晓娜 余忠 兰中文 YAN Yan;SUN Ke;YANG Chang-long;WANG Wei;GUO Rongdi;JIANG Xiao-na;YU Zhong;LAN Zhong-wen(School of Materials and Energy,University of Electronic Science and Technology of China,Chengdu 610054,China;State Grid Shenyang Electric Power Supply Company,Shenyang 110811,China)

机构地区：[1]电子科技大学材料与能源学院,四川成都610054 [2]国网辽宁省电力有限公司沈阳供电公司,辽宁沈阳110811

出　　处：《磁性材料及器件》2020年第3期1-5,共5页Journal of Magnetic Materials and Devices

基　　金：国家自然科学基金资助项目(51101028);国家电网公司科学技术项目(2018YF-26)。

摘　　要：采用旋转喷涂法在Si(100)基片上制备Ni0.25Zn0.15Fe2.6O4(100 nm)铁氧体薄膜作为种子层,然后在种子层上采用射频磁控溅射法沉积Ni0.25Cu0.09Zn0.66Fe1.998O4(600 nm)铁氧体薄膜。研究了种子层对NiZn铁氧体双层膜微观形貌、饱和磁化强度、矫顽力、磁导率及截止频率的影响。结果表明,Ni0.25Zn0.15Fe2.6O4种子层的引入促进了NiZn铁氧体双层膜尖晶石相的晶化和晶粒生长。NiZn铁氧体双层膜的饱和磁化强度Ms为420 kA/m,矫顽力Hc为5.9kA/m,截止频率fr为1.37 GHz,磁导率μ’(300 MHz)高达202。Ni0.25Zn0.15Fe2.6O4(100 nm) ferrite thin film was deposited as a seed layer on Si(100) substrate by spin spray plating. Then, Ni0.25Cu0.09Zn0.66Fe1.998O4 (600 nm) ferrite thin film was deposited on the seed layer by radio frequency magnetron sputtering. The effects of seed layer on the morphology, saturation magnetization, coercivity, permeability and cut-off frequency of NiZn ferrite bilayer films were investigated. The results show that the Ni0.25Zn0.15Fe2.6O4 seed layer promotes the formation of spinel phase and grain growth of NiZn ferrite bilayer film. The NiZn ferrite bilayer film features a saturation magnetization Ms of 420 kA/m, coercive force Hc of 5.9 kA/m, cut-off frequency fr of 1.37 GHz, and permeability (300 MHz) of as high as 202.

关 键 词：NiZn薄膜 种子层 矫顽力 磁导率 

分 类 号：TM277[一般工业技术—材料科学与工程] O484.4[电气工程—电工理论与新技术]