Si2F6检测及其应用概述  

Overview of Si2F6 detection and its application

作　　者：宦其山 唐安江[2] 田合鑫 韦德举[2] 唐石云[2] 郭俊江[2] HUAN Qi-shan;TANG An-jiang;TIAN He-xin;WEI De-ju;TANG Shi-yun;GUO Jun-jiang(College of Chemistry and Chemical Engineering,Guizhou University,Guiyang 550025,China;Guizhou Institute of Technology,Guiyang 550003,China)

机构地区：[1]贵州大学化学与化工学院,贵州贵阳550025 [2]贵州理工学院,贵州贵阳550003

出　　处：《应用化工》2020年第4期965-968,共4页Applied Chemical Industry

基　　金：国家自然科学基金(2176060184);贵州省科技计划项目(黔科合SY字[2014]3058,LH字[2016]7104,LH字[2015]7095);氟硅材料工程技术研究中心(黔教合KY字[2016]014)。

摘　　要：六氟乙硅烷一个最重要的应用是作为储存二氟化硅的原料,热解即可以提供二氟化硅,二氟化硅作为制备很多含氟硅化合物的中间体,产量稳定、持续提供将对很多含氟硅化合物制备分离,研究其结构性质,物理、化学性质有重要影响,而其中最关键一步是制取二氟化硅。本文综述六氟乙硅烷的来源、制备、检测方法,及其应用,同时对六氟乙硅烷前景进行展望。As the most important application of hexafluorodisilane,it is used as a storage material for silicon difluoride.Pyrolysis can provide silicon difluoride and silicon difluoride as intermediates for preparing many fluorine-containing silicon compounds.Providing separation of many fluorine-containing silicon compounds,structural properties,physical and chemical properties will have an important impact,and the most critical step is to prepare silicon difluoride.This paper will source,prepare and test hexafluorodisilane.and their applications are outlined,while prospects for hexafluorodisilane.

关 键 词：SiF2 Si2F6 检测 应用 

分 类 号：TQ117[化学工程—无机化工]