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作 者:陈瑜 潘永强[1,2] 刘丙才[1,2] 田爱玲 李靓[1,2] CHEN Yu;PAN Yong-qiang;LIU Bing-cai;TIAN Ai-ling;LI Jing(School of Optoelectronic Engineering,Xi′an Technological University,Xi′an 710021,China;Shaanxi Province Key Laboratory of Membrane Technology and Optical Test,Xi′an 710021,China)
机构地区:[1]西安工业大学光电工程学院,西安710021 [2]教育部薄膜与光学制造技术重点实验室,西安710021
出 处:《光学精密工程》2020年第6期1314-1322,共9页Optics and Precision Engineering
基 金:陕西省科技厅资助项目(No.2019KW-016);陕西省教育厅资助项目(No.17JS048)。
摘 要:在窗口傅里叶变换(WFT)相位提取技术中,抑制线性相位误差和背景光强干扰对窗口尺寸的需求条件存在矛盾,无法对二者进行同时抑制,故提出一种通过改变输入信号频谱成分的线性相位误差抑制技术,该技术利用傅里叶空频分析法将输入信号进行背景光强滤除并保留基频成分,使测量结果不受背景光强影响;考虑到线性相位误差同样受到窗口尺寸选取的影响,通过仿真分析确定最优窗口尺寸判定依据;采用该方法重构抛物面形并以相移干涉技术所获面形结果为基准进行对比分析,结果表明,本文提出方法可实现线性相位误差与背景光强干扰的综合抑制效果并提高了传统WFT相位提取精度。In the Window Fourier Transform(WFT) phase extraction technique, there is a contradiction between suppressing the linear phase error and background intensity interference on the window size, and it is impossible to suppress both simultaneously. Therefore, a linear phase error suppression technique based on changing the spectral components of the input signal was proposed. The Fourier space-frequency analysis method was used to filter the input signal and preserve the fundamental frequency components.This ensured that the measurement results were not affected by the background intensity. Considering that the linear phase error was also affected by the window size selection, the optimal window size was determined by simulation analysis.Finally, the parabolic shape was reconstructed by this method and compared with the surface shape obtained by the phase-shifting. The results show that compared to the traditional phase extraction technique, the proposed method achievesa comprehensive suppression effect of the linear phase error and background intensity interference.Moreover, it improves the traditional WFT phase extraction accuracy.
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