10cm×10cm Bulk Micromegas探测器的研制  

Research and Development of 10 cm×10 cm Bulk Micromegas Detector

作　　者：李沛玉 周静[1] 陈雷 赵明锐 智宇 刘雯迪 贾世海 张昀昱 胡守扬[1] 于伟翔[1] 李笑梅[1] LI Peiyu;ZHOU Jing;CHEN Lei;ZHAO Mingrul;ZHI Yu;LIU Wendi;JIA Shihai;ZHANG Yunyu;HU Shouyang;YU Weixiang;LI Xiaomei(Key Laboratory of Nuclear Data,China Institute of Atomic Energy,Beijing 102413,China)

机构地区：[1]中国原子能科学研究院核数据重点实验室,北京102413

出　　处：《原子能科学技术》2020年第6期963-967,共5页Atomic Energy Science and Technology

基　　金：国家财政部稳定支持研究经费资助项目(WDJC-2019-16);国家重点研发计划资助项目(2018YFE0104800,2016YFA0400300,2016YFE0100900);国家自然科学基金资助项目(11775313)。

摘　　要：Bulk Micromegas探测器是一种新型微结构气体探测器.利用光蚀刻技术制作了有效面积为10cm×10cm的多通道Bulk Micromegas探测器.对探测器的各通道进行了电容测试,显示探测器具有较好的均匀性.在Ar+10%CO2气体中,使用55Fe放射源和自主研制的基于APV25前端卡的数字化电子学,对制作的有效面积为10cm×10cm的探测器进行了测试,其结果显示探测器性能良好,能得到清晰的二维事件分布图.该探测器目前全部工艺国产化,并能进行批量生产,成品率接近100%.Bulk Micromegas detector is a new type of microstructure gas detector. A multi-channel Bulk Micromegas detector with an effective area of 10 cm×10 cm was fabricated by using photolithography. Capacitance tests were performed on each channel of the detector, showing good uniformity of the detector. The detector with an effective area of 10 cm × 10 cm was tested in the gas of Ar+10%CO2, using 55Fe radioactive source and digital electronics based on APV25 front-end card independently. The detector achieved good performance, obtaining a clear two-dimensional event distribution map. At present, all the processes of this detector can be made locally in China and can be mass-produced, and the yield rate is close to 100%.

关 键 词：Bulk Micromegas APV25 光蚀刻技术 前端电子学 

分 类 号：O572.21[理学—粒子物理与原子核物理]