用于微结构气体探测器的类金刚石碳阻性电极制备研究  

Development of Diamond-like Carbon Resistive Electrode for Micro-pattern Gas Detector

作　　者：尚伦霖 周意[3] 吕游[3] 张广安[2] 李文生[1] SHANG Lunlin;ZHOU Yi;LYU You;ZHANG Guang'an;LI Wensheng(School of Materials Science and Engineering,Lanzhou University of Technology,Lanzhou 730050,China;State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;State Key Laboratory of Particle Detection and Electronics,University of Science and Technology of China,Hefei 230026,China)

机构地区：[1]兰州理工大学材料科学与工程学院,甘肃兰州730050 [2]中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000 [3]核探测与核电子学国家重点实验室,中国科学技术大学,安徽合肥230026

出　　处：《原子能科学技术》2020年第6期968-974,共7页Atomic Energy Science and Technology

基　　金：核探测与核电子学国家重点实验室资助项目(SKLPDE-KF-201908);国家自然科学基金青年科学基金资助项目(11905273)。

摘　　要：通过磁控溅射法制备了用于微结构气体探测器(MPGD)的新型类金刚石碳(DLC)阻性电极,研究了靶电流、真空度、元素掺杂等因素对DLC阻性电极面电阻的影响规律,以及DLC阻性电极结合强度和内应力的优化方法.结果表明:随靶电流的增大,DLC阻性电极的面电阻降低;真空度越高,DLC阻性电极的面电阻越小,稳定性越好;氢元素和氮元素的掺杂使得DLC阻性电极的面电阻增大,且氢元素影响更加明显.本文方法为新构型微结构气体探测器的研发和性能提升奠定了技术基础.A new type of diamond-like carbon(DLC)resistive electrode for micro-pat-tern gas detector(MPGD)was developed by magnetron sputtering.A variety of factors affecting DLC surface resistivity were studied systematically,including target current,vacuum degree and element doping.Also the bonding strength and internal stress of DLC resistive electrodes were adjusted and optimized.The results show that the surface resistivity decreases as the target current increases.The higher the vacuum degree,the smaller the surface resistivity of DLC resistive electrode and the better the stability.The.doping of hydrogen and nitrogen can increase the surface resistivity and the influence of hydrogen is greater.This method lays a technical foundation for the development and performance improvement of new detector.

关 键 词：微结构气体探测器 类金刚石碳阻性电极 面电阻 

分 类 号：TB43[一般工业技术]