一种用于三维闪存测试的低成本PMU电路  

A low-cost PMU circuit for 3D NAND Flash memory testing

作　　者：张玺 王颀[2,3] 童炜 霍宗亮 ZHANG Xi;WANG Qi;TONG Wei;HUO Zong-liang(University of Chinese Academy of Sciences,Beijing 100049,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Yangtze Memory Technologies Co.,Ltd.,Wuhan 430000,China)

机构地区：[1]中国科学院大学,北京100049 [2]中国科学院微电子研究所,北京100029 [3]长江存储科技有限责任公司,湖北武汉430000

出　　处：《微电子学与计算机》2020年第5期1-5,共5页Microelectronics & Computer

基　　金：国家科技重大专项(2017ZX02301002)。

摘　　要：为了改善3D NAND测试机价格昂贵导致的闪存芯片成本过高的问题,提出了一种新的基于FPGA的用于3D NAND闪存芯片直流参数测试的低成本PMU(精密测量单元)电路.利用FPGA灵活的可编程特性,通过对ADC、DAC和继电器等分立元件工作的控制,实现了具有FVMI(加电压测电流)、FIMV(加电流测电压)等直流参数测试功能的PMU电路.该PMU电路已应用于YMTC自研3D NAND Flash测试平台,可以对3D NAND的直流参数进行准确测量,并且测试机台的成本只有大型ATE机台的0.175%,从而缓解了芯片测试成本过高的问题.In order to improve the cost of the chip caused by the high price of the 3 D NAND tester, a new FPGA-based low-cost PMU(precision measurement unit) circuit for DC parameter testing of 3 D NAND memory chips is proposed. The flexible programmable feature of the FPGA is used to implement the PMU circuit by controlling the discrete components of the ADC, DAC and relays so that the PMU circuit can test DC parameters with FVMI(Force Voltage Measure Current) and FIMV(Force Current Measure Voltage) function. The PMU circuit has been applied to the YMTC self-developed 3 D NAND Flash test platform, which can accurately measure the DC parameters of the 3 D NAND, and the cost of the test machine is only 0.175% of the cost of the large ATE machine, thus alleviating the problem of excessive test cost of the chip.

关 键 词：3D NAND FPGA 直流参数测试 精密测量单元 

分 类 号：TN407[电子电信—微电子学与固体电子学]