FeSiAl微波衰减材料激光3D打印技术研究  

Selective Laser Melting of 3D-Printed FeSiAl Microwave Attenuating Material:An Experimental Study

作　　者：刘颖琴 张永清[2] 肖静宇 李光华 金鹤 高向阳 Liu Yingqin;Zhang Yongqing;Xiao Jingyu;Li Guanghua;Jin He;Gao Xiangyang(University of Chinese Academy of Sciences,Beijing 101407,China;Key Laboratory of Science and Technology on High Power Microwave Sources and TechnologiesInstitute of Electronics,Chinese Academy of Sciences,Beijing 101407,China;Faculty of Materials Science and Engineering,Kunming University of Science and Technology,Kunming 650093,China)

机构地区：[1]中国科学院大学,北京101407 [2]中国科学院电子学研究所,高功率微波源与技术重点实验室,北京101407 [3]昆明理工大学材料科学与工程学院,昆明650093

出　　处：《真空科学与技术学报》2020年第3期207-213,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家重点研发计划(2018YFB1105200)。

摘　　要：为适应新型微波真空电子器件对微波衰减材料"薄、轻、宽、强"的发展需求,解决传统人工涂敷和烧结无法精确控制涂层厚度的问题,本文提出了使用3D打印SLM技术制备FeSiAl涂层的新思路。首先,筛选出SLM成型后衰减性能最好的FeSiAl合金粉末;其次,研究3D打印工艺参数对成型件衰减性能的影响规律。研究表明,选择200目以细、Fe∶Si∶Al∶O的质量百分比为74.63∶11.64∶3.36∶10.37的FeSiAl合金粉末,取3D打印的工艺参数为激光功率175 W、扫描速度1600mm/s、扫描间距0.06 mm、铺粉厚度0.02 mm,预热温度为80℃,可制备出具有优异微波衰减性能的FeSiAl涂层,较好地满足器件设计及制造需求。We addressed the selective laser melting(SLM) of 3 D printed FeSiAl microwave attenuating material for fabrication of advanced microwave vacuum electronic devices.The influence of 3 D printing and SLM solidification conditions,including the grain-size/mass-ratio/thickness of FeSiAl powder,preheating temperature and power/scanning-speed/scanning line-width of laser beam,on the microstructures,microwave attenuation and mechanical properties of the FeSiAl pattern was investigated.The results show that the printing and solidification conditions all had a major impact.For example,the optimized conditions included:grain-size of 200 mesh,Fe∶Si∶Al∶O mass-ratio of 74.63∶11.64∶3.36∶10.37,thickness of 0.02 mm,laser beam power of 175 W,scanning speed of 1600 mm/s,scanning line-width of 0.06 mm,and preheating temperature of 80℃.The FeSiAl pattern,formed by 3 D printing and SLM solidification under the optimized conditions,displays good attenuation properties and meets the requirements on design/fabrication of microwave vacuum electronic devices.

关 键 词：FeSiAl涂层 3D打印 SLM 微波衰减 

分 类 号：TM25[一般工业技术—材料科学与工程] TN1[电气工程—电工理论与新技术]