纳米集成电路用大直径硅与硅基材料的研究进展  

Research Progress of Large Diameter Silicon and Silicon-based Materials for Nano-Integrated Circuit

作　　者：钟锐涛 ZHONG Ruitao

机构地区：[1]合肥工业大学,安徽合肥230000

出　　处：《科技创新与应用》2020年第18期68-69,共2页Technology Innovation and Application

摘　　要：长期以来,半导体硅材料对信息产业发展起到了决定性的作用。当前纳米集成电路发展起来,使用硅基材料,器件功耗有所降低,运行速度提升,各种负面影响减少。文章着重于探讨纳米集成电路用大直径硅与硅基材料的研究进展。For a long time, semiconductor silicon materials have played a decisive role in the development of information industry. At present, with the development of nano-integrated circuits and the use of silicon-based materials, the power consumption of devices has been reduced, the running speed has been increased, and various negative effects have been reduced. This thesis focuses on the research progress of large diameter silicon and silicon-based materials for nano-integrated circuits.

关 键 词：纳米集成电路 大直径硅 硅基材料 研究进展 

分 类 号：TN40[电子电信—微电子学与固体电子学]