电子束诱导沉积钴微米线及其铁磁性  

Electron Beam Induced Deposition and Ferromagnetic Properties of Co Microwires

作　　者：杨朴 杨泽燕 王子佳 李永杰 祝筠晗 相文峰[2] 邢颖 Yang Pu;Yang Zeyan;Wang Zijia;Li Yongjie;Zhu Junhan;Xiang Wenfeng;Xing Ying(College of Physics,China University of Petroleum(Beijing),Beijing102249,China;College of New Energy and Materials,China University of Petroleum(Beijing),Beijing102249,China)

机构地区：[1]中国石油大学(北京)理学院,北京102249 [2]中国石油大学(北京)新能源与材料学院,北京102249

出　　处：《微纳电子技术》2020年第5期359-365,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(11974430,11704414);北京市自然科学基金资助项目(Z180010);中国石油大学(北京)基金资助项目(2462018BJC005)。

摘　　要：通过电子束诱导沉积的方法制备了钴(Co)微米线,并利用扫描电子显微镜(SEM)、原子力/磁力显微镜(AFM/MFM)以及物性测量系统(PPMS)等手段对Co微米线的沉积尺寸、微结构、铁磁性和电学性质进行了测试和分析。研究结果表明:Co微米线轮廓清晰、均匀性好。在不同的沉积条件下,微米线的实际长度与设定长度基本一致;实际宽度数据呈类梯形分布,半高宽是设定值的2~10倍;实际厚度低于设定厚度的60%。沉积电流对Co微米线的铁磁特性有重要影响。当沉积电流大于0.5 nA时,样品呈现出良好的铁磁特性。另外,电学性能测试结果显示Co微米线呈现绝缘特性。成功制备了室温铁磁绝缘Co微米线,这将有助于深入开展微纳尺度的结构与器件的研究和应用。Cobalt(Co)microwires were prepared by the electron beam induced deposition method.The deposition size,micro-structure,ferromagnetic and electrical properties of the Co microwires were measured and analyzed by the scanning electron microscope(SEM),atomic force microscope/magnetic force microscope(AFM/MFM)and physical property measurement system(PPMS).The research results indicate that the Co microwires possess clear contour and good uniformity.Under different deposition conditions,the actual length of the microwire is basically the same as the set length.The actual width data appear trapezoidal distribution,the half-height width is 2-10 times of the set value,and the actual thickness is less than 60%of the set thickness.The deposition current has a great effect on the ferromagnetic property of the Co microwires.When the deposition current is larger than 0.5 nA,the samples show good ferromagnetic property.Moreover,the electrical performance test results reveal that the Co microwires are insulator.The insulating Co microwires with the ferromagnetic property were successfully prepared at room temperature,which will be helpful for the further research and application of the structures and devices at micro-nano scale.

关 键 词：钴微米线 微纳尺度 电子束诱导沉积 磁力显微镜(MFM) 铁磁绝缘体 

分 类 号：TM271[一般工业技术—材料科学与工程]