移动X射线光刻制备等腰三角形结构的PMMA微通道  

PMMA Microchannels with Isosceles Triangle Structure Prepared by Moving X-Ray Lithography

作　　者：王洁 王欢 吴文渊 李以贵 Wang Jie;Wang Huan;Wu Wenyuan;Li Yigui(School of Science,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院,上海201418

出　　处：《微纳电子技术》2020年第4期292-297,311,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51035005);上海市科技兴农重点攻关项目(沪农科创字(2018)第3-3号);上海市“联盟计划”资助项目(LM201929)。

摘　　要：利用移动X射线光刻工艺,制备了六种不同深宽比的等腰三角形结构的聚甲基丙烯酸甲酯(PMMA)微通道。基于毛细管原理,将PMMA微通道与老鼠血液接触,对血液进行了微量采集。该PMMA微通道是中间带有凹槽结构的等腰三角形结构,凹槽结构的宽度为10μm、长度为6.7~39.4μm。将32个高度为35 mm的PMMA微通道的基板垂直插入老鼠血液样品中,通过实验测定了六种不同等腰三角形结构的PMMA微通道的接触角、表面张力及血液上升高度。结果表明,在一定范围内,PMMA微通道的深宽比越大,血液上升越容易,液体提取量也越多。对于通道横截面长度为39.4μm的微通道,样品血液在15 s时的上升高度可达到20.45 mm,达到最终30 s时上升高度的89.9%以上。Six kinds of polymethyl methacrylate(PMMA)microchannels with isosceles triangle structures with different aspect ratios were prepared by using moving X-ray lithography process.Based on the capillary principle,the PMMA microchannels were contacted with mouse blood,and the blood was collected in trace amounts.The PMMA microchannel is an isosceles triangle structure with a groove structure in the middle.The width of the groove structure is 10μm and the length is between 6.7μm and 39.4μm.The substrates of 32 PMMA microchannels with a height of 35 mm were vertically inserted into mouse blood samples,and the contact angles,surface tension and blood rising height of six PMMA microchannels with different isosceles triangle structures were measured experimentally.The results show that within a certain range,the larger the aspect ratio of the PMMA microchannel,the easier the sample blood is to rise,and the more liquid is extracted.For a microchannel with a channel cross-section length of 39.4μm,the rise height of the sample blood can reach 20.45 mm at 15 s and can reach more than 89.9%of the rise height at the final 30 s.

关 键 词：微电子机械系统(MEMS) 聚甲基丙烯酸甲酯(PMMA)微通道 移动X射线曝光工艺 毛细现象 采血实验 

分 类 号：TH703[机械工程—仪器科学与技术] TN305.7[机械工程—精密仪器及机械]