Dielectric metalens-based Hartmann–Shack array for a high-efficiency optical multiparameter detection system  

作　　者：YUXI WANG ZHAOKUN WANG XING FENG MING ZHAO CHENG ZENG GUANGQIANG HE ZHENYU YANG YU ZHENG JINSONG XIA 

机构地区：[1]Wuhan National Laboratory for Optoelectronics,School of Optical and Electronic Information,Huazhong University of Science and Technology(HUST),Wuhan 430074,China [2]State Key Laboratory of Advanced Optical Communication Systems and Networks,Department of Electronic Engineering,Shanghai Jiao Tong University,Shanghai 200240,China [3]State Key Laboratory of High Performance Complex Manufacturing,Central South University,Changsha 410083,China

出　　处：《Photonics Research》2020年第4期482-489,共8页光子学研究（英文版）

基　　金：State Key Laboratory of Advanced Optical Communication Systems and Networks(2019GZKF03001);Fundamental Research Funds for the Central Universities(2019kfy XKJC038);National Natural Science Foundation of China(11574102,61475009,61835008)。

摘　　要：The real-time measurement of the polarization and phase information of light is very important and desirable in optics.Metasurfaces can be used to achieve flexible wavefront control and can therefore be used to replace traditional optical elements to produce a highly integrated and extremely compact optical system.Here,we propose an efficient and compact optical multiparameter detection system based on a Hartmann–Shack array with 2×2subarray metalenses.This system not only enables the efficient and accurate measurement of the spatial polarization profiles of optical beams via the inspection of foci amplitudes,but also measures the phase and phasegradient profiles by analyzing foci displacements.In this work,details of the design of the elliptical silicon pillars for the metalens are described,and we achieve a high average focusing efficiency of 48%and a high spatial resolution.The performance of the system is validated by the experimental measurement of 22 scalar polarized beams,an azimuthally polarized beam,a radially polarized beam,and a vortex beam.The experimental results are in good agreement with theoretical predictions.

关 键 词：Dielectric metalens-based Hartmann Shack array a high-efficiency optical MULTIPARAMETER detection system 

分 类 号：O436.3[机械工程—光学工程]