纳秒脉冲激光对钕铁硼材料表面清洗试验研究  

Research on Surface Cleaning of NdFeB Material by Nanosecond Pulsed Laser

作　　者：仝志宏 刘国东[1] 黎相孟 任宁 赵玉田 刘帅康 TONG Zhi-hong;LIU Guo-dong;LI Xiang-meng;REN Ning;ZHAO Yu-tian;LIU Shuai-kang(Shanxi Provincial Key Laboratory of Advanced Manufacturing Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学先进制造技术山西省重点实验室,太原030051

出　　处：《科学技术与工程》2020年第14期5650-5655,共6页Science Technology and Engineering

基　　金：国家自然科学基金(51705479);山西省自然科学基金(201801D121182)。

摘　　要：利用激光清洗技术对钕铁硼材料进行清洗试验,探究不同激光功率对钕铁硼材料清洗效果的影响。通过扫描电子显微镜(scanning etectron microscope,SEM)和X射线能谱仪(energy dispersive spectroscopy,EDS)分析清洗后钕铁硼材料表面形貌及元素组成成分;利用白光干涉仪检测清洗后钕铁硼材料表面的粗糙度。结果表明,清洗后钕铁硼材料的表面粗糙度随着激光功率的增大先增大后减小随后又增大;激光功率较小时,钕铁硼材料表面存在烧蚀划痕和残留的腐蚀坑,表面C、O元素不能有效去除,清洗效果不佳;在激光功率为12 W,清洗后的材料表面光洁平整,无C、O元素,表面晶相组织完整清晰无破坏,说明此时激光清洗效果最佳;当激光功率更大时,超过材料的损伤阈值,表面出现微裂纹和细小的孔洞,说明清洗效果变差。The cleaning experiment of NdFeB materials was carried out by laser cleaning technology,and the effects of different laser powers on the cleaning effect of NdFeB materials were investigated.The surface morphology and elemental composition of the NdFeB material after cleaning were analyzed by scanning electron microscope(SEM)and energy dispersive spectroscopy(EDS).The surface roughness of the cleaned NdFeB material was measured by a white light interferometer.The results show that the surface roughness of the NdFeB material increases firstly,decreases then and increases at last,with the increase of laser power.When the laser power is small,there are ablation scratches and residual corrosion Pit on the surface of NdFeB material.C and O elements on the surface can not be effectively removed,indicating the cleaning is not complete.When the laser power is 12 W,the surface of the material is smooth and clean after cleaning,without C and O elements.The surface crystal phase is clear and intact without damage,indicating the power is best for laser cleaning at this time.When the laser power is larger,the damage threshold of the material is exceeded,micro-cracks and fine holes appear on the surface,and the cleaning effect is deteriorated.

关 键 词：激光技术 激光清洗 钕铁硼材料 表面形貌 表面粗糙度 

分 类 号：TN249[电子电信—物理电子学]