扫描哈特曼方法的像质检测性能分析  

Analysis of Image Quality Detection Performance of Scanning Hartmann Technology

作　　者：戴勋义 谭毅[1,2] 任戈 谢宗良[1,2] Dai Xunyi;Tan Yi;Ren Ge;Xie Zongliang(Key Laborutory of Beam Control,Institute of Optics and Electromics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;University of Chinese Aademy of Sciences,Bejing 100049,China)

机构地区：[1]中国科学院光电技术研究所光束控制重点实验室,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《光学学报》2020年第7期109-116,共8页Acta Optica Sinica

基　　金：脉冲功率激光技术国家重点实验室开放基金(SKL2018KF05);四川省科学委员会优秀青年基金(2019JDJQ0012);中国科学院青年创新促进会(2018411)。

摘　　要：扫描哈特曼技术是检测大口径望远镜像质的常用方法,但其对不同阶次像差的检测能力和不同子孔径分布下的检测精度尚不明确。利用基于Zemax和Matlab的仿真模型对该技术的检测性能进行了探究。仿真结果表明:扫描哈特曼法能有效检测到最高第28阶像差,方均根(RMS)相对误差在5%以内,在对多阶混合像差检测时难以有效分辨其中的高阶成分;采用相切子孔径分布能较好地平衡检测精度和检测效率;增加子孔径数目能提升检测精度,但增加到一定数目后精度提升十分缓慢,同时检测时间大幅增加。The scanning Hartmann technology is a commonly used method to detect the imaging quality of large-aperture telescopes;however, the detection performance of different-order aberrations and the detection accuracy under different sub-aperture distributions remain unclear. Therefore, we develop a simulation model using Matlab and Zemax to study detection performance of this technology. The simulation results show that the highest 28th-order aberration can be detected using the scanning Hartmann technology and that the root mean square(RMS) relative error is less than 5%. Further, it is difficult to distinguish the high-order aberration component when detecting multi-order aberrations. The usage of tangent sub-aperture distribution can better balance the detection accuracy and efficiency. The usage of a large number of sub-apertures can effectively increase the detection accuracy;however, the accuracy is slowly improved after the number of sub-apertures is increased to a certain number, while the detection time is greatly increased.

关 键 词：测量 扫描哈特曼技术 ZERNIKE多项式 像质检测 子孔径斜率 

分 类 号：TH741[机械工程—光学工程]