碳纳米管在微纳电子器件中的应用与研究  

Application of the Carbon nanotube in micro and nano electronic devices

作　　者：张庆玲 李运琴 ZHANG Qing-ling;LI Yun-qin(Jiangsu Engineering Design and Research Institute Co.Ltd Henan Branch,Zhengzhou,450007,China;National Energy Large-scale Physical Energy Storage Technology Research and Development Center,Bijie,551700,China)

机构地区：[1]江苏中建工程设计研究院有限公司河南分公司,河南郑州450007 [2]国家能源大规模物理储能技术(毕节)研发中心,贵州毕节551700

出　　处：《化工管理》2020年第17期146-147,共2页Chemical Engineering Management

摘　　要：碳纳米管(CNT)作为一种新型碳纳米材料,除具有传统碳材料的优良性质外,还具有比表面积大、机械强度大、硬度大、小尺寸效应、量子效应、热稳定性高以及导电性好等独特的电化学特性,成为应用于微纳电子器件中的理想功能材料。与传统电子器件相比,碳纳米管微纳电子器件的各项性能均更优越。文章着重介绍了碳纳米管的制备方式及其在微纳电子中的应用。Carbon nanotubes(CNTS)have been a new type of car⁃bon nanomaterials,in addition to the excellent properties of tradi⁃tional carbon materials,they also have the unique electrochemical characteristics,such as large specific surface area,high mechanical strength,high hardness,small size effect,quantum effect,high ther⁃mal stability and good conductivity,etc.Comparing to traditional electronic devices,CNT-baesd electronic devices have unique properties.This paper focuses on the preparation of carbon nano⁃tubes and their applications in micro-and nano-electronics.

关 键 词：碳纳米管 微纳电子 导电性 应用 

分 类 号：TB383.1[一般工业技术—材料科学与工程] TN03[电子电信—物理电子学]