基于气旋原理的MEMS热膜式气体流量传感器除尘装置  

The dust removal device for MEMS gas flow sensor based on cyclone principle

作　　者：葛言 孙中圣[1] 袁昌荣[1] 李小宁[1] Ge Yan;Sun Zhongsheng;Yuan Changrong;Li Xiaoning(School of Mechanical Engineering,Nanjing University of Science and Technology,Jiangsu Nanjing,210094,China)

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《机械设计与制造工程》2020年第5期102-106,共5页Machine Design and Manufacturing Engineering

基　　金：国家自然科学基金资助项目(51475242)。

摘　　要：为了提高MEMS热膜式气体流量传感器的防尘能力,设计了一种基于气旋原理的除尘装置。运用正交试验的方法,在适当的范围内选取尺寸参数进行组合,以提高除尘效率为优化目标,通过仿真确定了除尘装置尺寸参数的具体数值,并且进一步分析了除尘装置的除尘性能。通过实验测量除尘装置的支路流量比例、压力损失和除尘效率,验证了仿真分析的结果,测定了防尘装置的实际工作性能。结果表明:除尘装置对粒径在5μm以上的粉尘具有良好的除尘效果,除尘效率最高可达80%。In order to improve the dust-proof ability of MEMS gas flow sensor,a dust removal device based on cyclone principle is designed.The simulation analysis scheme utilizes the method of orthogonal test to improve the dust removal efficiency,and determines the size parameter of the dust removal device.The performance characteristics of the dust removal device are further analyzed.The conclusion of the simulation analysis is verified through the experienced results which determine the actual performance of the dust removal device.The dust removal device works well with the dust of particle size above 5μm,and dust removal efficiency can reach up to 80%.

关 键 词：气旋除尘 MEMS热膜式气体流量传感器 正交试验 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]