飞秒激光加工铌酸锂晶体:原理与应用  

Femtosecond laser processing of lithium niobate crystal:principle and applications

作　　者：周超 马嘉男 顼晓仪 徐钏 张勇 祝世宁 肖敏 Zhou Chao;Ma Jia-Nan;Xu Xiao-Yi;Xu Chuan;Zhang Yong;Zhu Shi-Ning;Xiao Min(National Laboratory of Solid State Microstructures,College of Engineering and Applied Sciences,and School of Physics,Nanjing University,Nanjing 210093,China;Department of Physics,University of Arkansas,Fayetteville,Arkansas 72701,USA)

机构地区：[1]南京大学现代工程与应用科学学院、物理学院,固体微结构物理国家重点实验室,南京210093 [2]阿肯色大学物理系,美国费耶特维尔阿肯色州72701

出　　处：《物理学进展》2020年第3期69-83,共15页Progress In Physics

基　　金：supported by the National Key R&D Program of China (2017YFA0303703 and 2016YFA0302500);the National Natural Science Foundation of China (NSFC) (91950206 and 11874213);Fundamental Research Funds for the Central Universities (021314380105)

摘　　要：由于具有超短的脉冲宽度和极高的峰值强度,飞秒激光微加工是一种有效的材料加工方法,已广泛应用于光子集成器件的加工。铌酸锂晶体具有优异的电光、非线性光学和压电特性,是集成光学和导波光学中常见的材料。本文综述了飞秒激光对铌酸锂晶体的处理,重点介绍了飞秒激光加工的物理原理及其制备的铌酸锂基光子器件的最新进展。飞秒激光技术使铌酸锂晶体在微纳光子学领域具有广阔的应用前景。Femtosecond(fs)-laser micromachining is an effective material processing method because of its ultrashort pulse width and extremely high peak intensity.Fs-laser micromachining technology has been widely used to process photonic integrated devices.Lithium niobate(LN)crystal is a common material in integrated and guided-wave optics because of its excellent electro-optic,nonlinear optical,and piezoelectric properties.This review describes fs-laser processing of LN crystal,mainly focusing on the physical principle of fs-laser processing and the recent advances of LN-based photonic devices.Fs-laser technology makes LN crystal a promising platform in the field of micro-nano photonics.

关 键 词：飞秒激光 铌酸锂 波导 非线性光子晶体 激光 

分 类 号：O37[理学—流体力学]