水辅助激光微细加工技术进展  

Review of water assisted laser micro⁃machining technology

作　　者：郭兵[1] 刘文超 赵清亮[1] SATA Habib AMR Monier GUO Bing;LIU Wenchao;ZHAO Qingliang;SATA Habib;AMR Monier(School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001,China)

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001

出　　处：《哈尔滨工业大学学报》2020年第7期11-19,共9页Journal of Harbin Institute of Technology

基　　金：国家自然科学基金(51875135);黑龙江省科学基金项目(E2018037)。

摘　　要：介绍了水辅助激光加工技术的研究现状,系统总结了水辅助激光加工技术的产生原因以及包含的主要技术内容.针对每种水辅助激光加工技术,详细介绍了国内外研究者在理论与实验方面的主要研究成果,并对不同水辅助激光加工技术之间的技术差异和适用范围进行了论述.水辅助激光微细加工技术在解决激光加工热损伤导致的精度损失、效率降低等方面具有明显的效果,各种形式的水辅助装置以及组合技术也为类似工程问题解决方案的拟定提供了参考价值.As a new micro-machining technology,water-assisted laser machining(WaLM)has a broad development prospect.The invention and main technical contents of WaLM are summarized,the main research achievements in theoretical and experimental fields for each kind of WaLM technology are introduced in detail,and the technical differences and applied scopes of each WaLM technology are discussed in this paper.The WaLM technology has obvious advantages in solving the problems of precision loss and efficiency reduction caused by laser thermal damage.Various WaLM devices and combination technologies also provide the reference for solutions of engineering problems.

关 键 词：激光加工技术 水辅助 水导激光 水射流辅助 喷雾辅助 

分 类 号：V261.8[航空宇航科学与技术—航空宇航制造工程]