质谱仪用离子泵供电和真空控制系统的研制  

Development of Ion Pump Power Supply and Vacuum Control System for Mass Spectrometer

作　　者：路晓川 赵加鹏[2] 田亮亮[2] 凌大鹏[2] 李航涛 Lu Xiaochuan;Zhao Jiapeng;Tian Liangliang;Ling Dapeng;Li Hangtao(The 718th Research Institute of CSIC,Hebei Handan,056027)

机构地区：[1]中国船舶重工集团公司第七一八研究所第四研究室,河北邯郸056027 [2]中国船舶重工集团公司第七一八研究所,河北邯郸056027

出　　处：《科技风》2020年第17期115-116,共2页

摘　　要：基于质谱仪小型化和集成化的需求,设计了一套离子泵供电和真空控制系统,该系统分为高压供电和真空控制两部分。高压供电部分主要通过集成到电路板上的高压模块来实现。真空控制部分主要通过以嵌入式处理器PIC32为主体的电路板实现真空度的采集以及减压泵等部件的开关控制。该系统作为配套设备已经在质谱仪上经过长期测试,性能可靠。Based on the miniaturization and integration of mass spectrometer,a set of ion pump power supply and vacuum control system is designed,which is divided into two parts:high voltage power supply and vacuum control.The high voltage power supply is mainly realized by the high voltage module integrated into the circuit board.In the vacuum control part,the circuit board with embedded processor PIC32 as the main body realizes the collection of vacuum degree and the switch control of components such as pressure relief pump.The system has been tested on the mass spectrometer for a long time and its performance is reliable.

关 键 词：离子泵高压控制 真空采集 PIC微处理器 

分 类 号：TH843[机械工程—仪器科学与技术]