Progress in achieving high-performance piezoresistive and capacitiveflexible pressure sensors: A review  

作　　者：Wufan Chen Xin Yan 

机构地区：[1]College of Information Science and Engineering,State Key Laboratory of Synthetical Automation for Process Industries,Northeastern University,Shenyang,110819,China

出　　处：《Journal of Materials Science & Technology》2020年第8期175-188,共14页材料科学技术（英文版）

基　　金：supported by the National Natural Science Foundation of China(Nos.61775032,61475134 and 11604042);the Fundamental Research Funds for the Central Universities(N170405007,N180406002,N180408018 and N160404009);the 111 Project(B16009)。

摘　　要：Electronic skin(e-skin) and flexible wearable devices are currently being developed with broad application prospects. Transforming electronic skin(e-skin) into true ¨skin¨is the ultimate goal. Tactile sensing is a fundamental function of skin and the development of high-performance flexible pressure sensors is necessary to realize thus. Many reports on flexible pressure sensors have been published in recent years,including numerous studies on improving sensor performance, and in particular, sensitivity. In addition,a number of studies have investigated self-healing materials, multifunctional sensing, and so on. Here,we review recent developments in flexible pressure sensors. First, working principles of flexible pressure sensors, including piezoresistivity, capacitance, and piezoelectricity, are introduced, as well as working mechanisms such as triboelectricity. Then studies on improving the performance of piezoresistive and capacitive flexible pressure sensors are discussed, in addition to other important aspects of this intriguing research field. Finally, we summarize future challenges in developing novel flexible pressure sensors.

关 键 词：Electronic skin Flexible pressure sensor PIEZORESISTIVITY Capacitive pressure sensor 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]