用于脉搏波检测的背接触式触觉传感阵列单元  

Research of a Back-Loaded Tactile Sensor Array Unit for Pulse-Wave Detection

作　　者：于婷婷 孙珂 裴彬彬 陈建中 钟朋 杨恒[1] YU Tingting;SUN Ke;PEI Binbin;CHEN Jianzhong;ZHONG Peng;YANG Heng(State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology(SIMIT),Chinese Academy of Sciences(CAS),Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海200050 [2]中国科学院大学,北京100049

出　　处：《传感技术学报》2020年第4期492-499,共8页Chinese Journal of Sensors and Actuators

基　　金：上海市科委项目(61701486)。

摘　　要：触觉传感器在脉搏波测量、仿生机器人等领域有重要应用。该方案制作背接触式传感器,并通过转移工艺实现芯片加工和圆片级芯片尺寸封装一体化,用组装工艺低成本实现大面积柔性触觉阵列;采用模块化设计,正压力与剪切力传感单元的尺寸和布线相同,制作可组装的标准单元;在传感器转移工艺中,采用无电极化学腐蚀自停止工艺,提高成品率。传感单元尺寸仅为300μm×300μm,与人类触觉传感的极限可比拟,灵敏度为2 mV/10 kPa,量程为150 kPa,已用于研制新型脉诊仪的柔性传感阵列,实现了脉搏波的实时测量。Tactile sensors have been widely applied in fields such as pulse-wave measurement,and bionic robots.The back-loaded sensor is fabricated based on the design scheme.Manufacture of the sensor chip and integration of wafer-level chip-scale packaging are done by means of a transfer process.Moreover,a large-area flexible tactile array is achieved by low-cost assembly processes.By adoption of modular design,the size and wiring for positive pressure and shear force are maintained so that standard units that can be assembled are successfully made.For the sensor transfer processes,the process of non-electrode chemical corrosion automatic suspension is used to improve the yield rate.The size of the sensor unit is 300μm×300μm,with a sensitivity of 2 mV/10 kPa and a measurement range of 150 kPa,which is comparable to the ultimate limits of human tactile sensing.Currently,it has been used to develop a new type of flexible sensor array of a pulse diagnosis instrument,which measures a pulse wave in real-time.

关 键 词：柔性触觉传感器 背接触式 转移工艺 模块化结构 无电极化学腐蚀自停止 脉搏波检测 

分 类 号：TN303[电子电信—物理电子学]