Bi:YIG石榴石薄膜生长工艺和磁光性能研究  

Study on Growth Process and Magneto-optical Properties of Bi:YIG Yttrium Iron Garnet Film

作　　者：王娟娟 李旭辉 曹阳 贾胜利 Wang Juanjuan;Li Xuhui;Cao Yang;Jia Shengli(Department of Chemistry and Chemical Engineering,Luliang University,Luliang 033001,China;Guandi Mountain State Owned Forestry Administration Millennium Forest Farm,Luliang 033001,China)

机构地区：[1]吕梁学院化学化工系,山西吕梁033001 [2]关帝山国有林管理局千年林场,山西吕梁033001

出　　处：《山东化工》2020年第10期36-38,共3页Shandong Chemical Industry

基　　金：山西省“1331工程”优势特色学科——材料科学与工程(吕梁学院)。

摘　　要：本文采用脉冲激光淀积PLD法在Si基片上生长了Bi掺杂钇铁石榴石(Bi:YIG),得到了Bi1.5Y1.5Fe5O12磁光薄膜。通过改变衬底温度和反应氧分压来控制淀积的薄膜质量。利用X射线衍射仪(XRD)和法拉第旋光测试装置测定了样品的物相结构和磁光性能。结果表明,在单步淀积生长Bi1.5Y1.5Fe5O12/Si过程中,基底温度越低、氧分压越高,越有利于薄膜结晶;同时生长了种子层YIG的Bi1.5Y1.5Fe5O12/YIG/Si的薄膜,较高的淀积温度和较高的氧分压是生长高结晶度Bi:YIG的必要条件。生长了种子层的薄膜结晶效果明显优于一步淀积生长的薄膜,且具有大的比法拉第旋转角,可以改善薄膜的磁光性能。Bi-doped yttrium iron garnet(Bi:YIG)was grown on the Si substrate by pulsed laser deposition PLD method,and a Bi1.5Y1.5Fe5O12 magneto-optical film was obtained.The quality of the film is controlled by changing the substrate temperature and the partial pressure of reactive oxygen.The phase structure and magneto-optical properties of the samples were measured by an X-ray diffractometer(XRD)and Faraday rotation tester.The results show that in the single-step deposition growth process of Bi1.5Y1.5Fe5O12/Si,a lower substrate temperature and higher oxygen partial pressurewill lead to a favorable film crystallization;simultaneously,theYIG seed layer was grown on the Bi1.5Y1.5Fe5O12/YIG/Si thin films.We found that a higher deposition temperature and higher oxygen partial pressure are necessary conditions for growing high quality Bi:YIG.The crystalline effect of the film with the seed layer grown is better than that of the film grown by one-step deposition,and it has a large specific Faraday rotation angle,which can greatly improve the magneto-optical properties of the film.

关 键 词：YIG 磁光薄膜 物相结构 磁光性能 

分 类 号：TM277.3[一般工业技术—材料科学与工程]