静电聚集空心阴极离子枪模拟仿真实验  

Simulation Experiment of Electrostatic Aggregation Hollow Cathode Ion Gun

作　　者：王小菊 魏旭耀 杨一帆 李茂想 陆荣国 WANG Xiaoju;WEI Xuyao;YANG Yifan;LI Maoxiang;LU Rongguo(School of Opto-electronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China)

机构地区：[1]电子科技大学光电科学与工程学院,成都610054

出　　处：《实验室研究与探索》2020年第4期83-85,142,共4页Research and Exploration In Laboratory

基　　金：国家自然科学基金项目(61704021);电子科技大学高等教育人才培养质量和教学改革项目(2016XJYYB021)。

摘　　要：对静电聚集空心阴极离子枪仿真实验提出了一套完整的设计方案。利用Opera模拟软件,对由空心阴极、栅极、多级静电透镜和阳极构成的静电聚集空心阴极离子枪进行模拟仿真。实现了对各极电位、束流大小、离子束轨迹和阳极束斑尺寸的模拟,并以直观的形式进行展示。学生通过完成该仿真实验,可深入理解该离子枪的结构、工作原理和场聚焦现象的基础知识。A complete design scheme was proposed for the simulation experiment of electrostatic aggregation hollow cathode ion gun.By using opera simulation software,the simulation experiment of electrostatic aggregated hollow cathode ion gun composed of hollow cathode,grid,multi-stage electrostatic lens and anode was carried out.The simulation of each electrode voltage,beam current,ion beam trajectory and anode beam spot size was realized and displayed intuitively.Through the simulation experiment,students can understand the structure,working principles and basic knowledge of field focusing phenomenon of the ion gun.

关 键 词：静电聚集 电位 阳极束斑 电流 静电透镜 

分 类 号：O462.4[理学—电子物理学]