ITO靶材第二相In4Sn3O12的结构及其对靶材性能的影响  

Microstructure of the Second Phase In4Sn3O12 and Its Effect on Properties ofITO Target Materials

作　　者：谢斌[1] 杨硕[1] 王伟宁 郗雨林[1] XIE Bin;YANG Shuo;WANG Weining;XI Yulin(Luoyang Ship Material Research Institute,Luoyang 471023,China;School of Materials Science and Engineering,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]中国船舶重工集团公司第七二五研究所,洛阳471023 [2]大连理工大学材料科学与工程学院,大连116024

出　　处：《材料导报》2020年第S01期29-33,共5页Materials Reports

基　　金：国家稀土稀有金属新材料研发和产业化专项资助(20121743)。

摘　　要：以自制的纳米ITO气化粉为原料,采用注浆成型工艺制备了不同SnO 2含量的ITO靶材,并采用不同烧结温度对SnO 2含量为10%(质量分数)的靶材进行了烧结,通过SEM分析了不同SnO 2含量ITO靶材的组织及第二相在靶材中的数量、形貌、分布。结果表明,在1575℃烧结温度下,随着SnO 2含量的增加,靶材晶粒得到细化,晶界交汇处第二相数量明显增多;当烧结温度提高至1600℃时,晶界处第二相发生分解,并向母相中转移。采用王水对1575℃烧结的SnO 2含量为10%的靶材进行腐蚀,提取第二相,并通过EDS、XRD、TEM、TGA分析了第二相的组分、物相结构及热重情况。研究表明,10%SnO 2含量ITO靶材晶界交汇处形成的第二相为六方结构的In 4Sn 3O 12,且靶材的氧含量与In 4Sn 3O 12有关。通过对不同SnO 2含量ITO靶材在密度、电阻率和热扩散系数方面的分析,间接研究了第二相对靶材性能的影响,发现SnO 2含量的增加有利于靶材密度的提高,同时使靶材电阻率增大、氧含量增高、热扩散系数减小。ITO target materials with different SnO2 content were prepared by injection molding using self-made nano ITO gasification powder as raw mate-rial.The target materials with 10%(mass fraction)SnO2 content were sintered at different sintering temperatures.The microstuctuer of ITO target materials with different SnO2 content and the quantity,morphology and distribution of the second phase in the target materials were analyzed by SEM.The results show that at the sintering temperature of 1575℃,with the increased SnO 2 content,the target grains were refined,and the number of the second phase at the intersection of grain boundaries was significantly increased;as the sintering temperature increased to 1600℃,the second phase at the boundary decomposed and transfered to the parent phase.The target with 10%SnO2 content sintered at 1575℃was corroded by aqua regia to extract the second phase.The composition,phase structure and thermogravimetry of the second phase were analyzed by EDS,XRD,TEM and TGA.The research indicates that the second phase formed at the intersection of grain boundary of ITO target with 10%SnO2 content is the hexagonal In 4Sn 3O 12 phase,and the oxygen content of target is related to In 4Sn 3O 12.Based on the analysis of density,resistivity and thermal diffusivity of ITO target with different SnO2 content,the influence of the second phase on the target performance was indirectly studied.It was found that the increase of SnO 2 content was beneficial to the increase of target density,while the increase of target resistivity,the increase of oxygen content and the decrease of thermal diffusivity.

关 键 词：ITO靶材 第二相 In4Sn3O12 氧含量 

分 类 号：TB383[一般工业技术—材料科学与工程]