中阶梯光栅厚铝膜纳米压痕硬度尺寸效应测试与分析  

Testing and Analysis of Indentation Size Effect AboutEchelle Grating Thick Al Film

作　　者：张宝庆[1] 庞壮 韦赟杰 于硕 ZHANG Baoqing;PANG Zhuang;WEI Yunjie;YU Shuo(School of Mechanical and Electrical Engineering,Changchun University of Science and Technology,Changchun 130022)

机构地区：[1]长春理工大学机电工程学院,长春130022

出　　处：《材料导报》2020年第S01期341-344,共4页Materials Reports

基　　金：国家自然科学基金(51575057)。

摘　　要：为了明确中阶梯光栅厚铝膜硬度特性,从而为中阶梯光栅刻划刀具晶体结构设计奠定基础,对中阶梯光栅厚铝膜进行了纳米压痕硬度测试与分析,表征了厚铝膜硬度特性。首先,对厚铝膜进行纳米压痕试验并提取了试验数据,采用O&P法计算了其硬度值。然后,通过对硬度值的拟合与分析,得出厚铝膜的硬度变化规律与宏观硬度值。实验与分析结果表明:中阶梯光栅厚铝膜在纳米压痕测试过程中会出现尺寸效应(0~0.2μm压深区间),并且不是单一随着压深增大而减小,而是呈现三个明显的变化区域,并且采用Almasri&Voyiadji模型表征了厚铝膜在压深为0~0.2μm区间的硬度变化特性。硬度值在压深为10~15 nm区间再次出现了三个明显变化区域;因此笔者对厚铝膜进行了金相试验与压入过程的接触分析,试验与分析结果表明:10~15 nm压深区域产生这种现象的原因是厚铝膜晶体发生了屈服。本研究具体表征了中阶梯光栅铝膜纳米压痕硬度尺寸效应变化规律,从晶体力学角度解释了极浅压深条件下硬度值变化的原因。In order to test the hardness characteristic of echelle grating thick Al film,so as to building blocks for the design of rulling tool,we test the echelle grating thick Al film by nanoindentation,and characteristic hardness about echelle grating thick Al film.First,we test hardness by using nanoindentation,and use the method of O&P to calculate hardness.Second,through the fitting and analysis of nanoindentation data,we know the hardness change rule and macroscopical hardness value of thick Al film.Estimates show that echelle grating thick Al film will occur indentation size effect in the nanoindentation testing(0—0.2μm),and this phenomenon will show three regions,it do not decreases as the depth of compression increases.We use the method of Almasri&Voyiadji to characteristic this phenomenon that indentation size effect in the nanoindentation testing(0—0.2μm).The hardness reappear change in 10—15 nm region,so we make contact analysis and metallographic test for thick Al film.Estimates show that thick Al film crystals is yield.In this paper,the indentation size effect of echelle grating thick Al film is characterized,and the reason of hardness change is explained from the perspective of crystal mechanics.

关 键 词：中阶梯光栅 纳米压痕硬度 压痕尺寸效应 

分 类 号：TP394[自动化与计算机技术—计算机应用技术]