冷阴极气体放电电子枪逆变电源的研制  

The Design of Inverter Power Supply for the Cold Cathode Gas Discharge Electron Gun

作　　者：许海鹰 张红玉 杨波 桑兴华 XU Hai-ying;ZHANG Hong-yu;YANG Bo;SANG Xing-hua(Science and Technology on Power Beam Generator Laboratory,AVIC Manufacturing Technology Institute,Beijing 100024,China)

机构地区：[1]中国航空制造技术研究院,高能束流发生器实验室,北京100024

出　　处：《电力电子技术》2020年第6期58-61,74,共5页Power Electronics

基　　金：国家自然科学基金(51775527)。

摘　　要：为了获得稳定的大功率冷阴极气体放电电子束流输出,提高冷阴极气体放电电子枪工作稳定性和可靠性,基于三级AC/DC逆变拓扑电路、逆变功率变压器输入并联与输出整流串联的电路、双闭环控制电路、放电脉冲尖峰保护电路等,研制了一台30 kW/20 kV冷阴极气体放电电子枪逆变电源。检测分析了气流量给定时电压变化对束流的影响规律、电源最大功率输出、功率变压器初级电压与电流波形及放电脉冲尖峰保护过程,试验结果表明:所研制的冷阴极气体放电电子枪逆变电源输出稳定,且能够满足最大功率输出的需求。In order to obtain stable high power electron beam and improve the working stability and reliability of cold cathode gas discharge electron gun,the three stage AC/DC inverter topology circuit,power transformer input parallel and output rectifier series connection circuit,double closed-loop control circuit,discharge pulse current protection circuit are introduced to design a inverter power supply for the cold cathode gas discharge electron gun,which power is up to 30 kW/20 kV.At gas flow given,the influence of voltage change on beam current,maximum power output of power supply,voltage and current waveform of primary coils of power transformer and the protection process of discharge pulse have been measured and analyzed.The experimental results show that the output of inverter power supply of the cold cathode gas discharge electron gun is stable.The maximum power output can meet the design requirement.

关 键 词：逆变电源 冷阴极 电子枪 

分 类 号：TN86[电子电信—信息与通信工程]