直线光栅尺的精度评价及标定方法研究  

Research on Accuracy Evaluation and Calibration Method of Linear Scale

作　　者：任东旭[1] 李彬[1] REN Dong-xu;LI Bin(School of Mechatronics Engineering,Zhongyuan University of Technology,Zhengzhou 450007,China)

机构地区：[1]中原工学院机电学院,郑州450007

出　　处：《组合机床与自动化加工技术》2020年第6期54-56,60,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家自然科学基金(51905558);中国纺织工业联合会科技指导项目(2019069);河南省高等学校重点科研项目(20A460032)。

摘　　要：直线光栅尺栅距误差与累积误差是衡量直线位移基准及测量精度的两个核心指标,为提升光栅尺精度的标定评价方法及误差补偿的精准度,文章基于光栅尺曝光刻线原理分析了影响光栅尺精度的误差源,提出了一种光栅条纹的最小区域法的评定方法,基于10种典型的光栅条纹特征总结出了最小区域法栅距误差表达式,诠释了最小区域面积及平均线宽的栅距误差评定方法,并对累积误差和热膨胀系数的标定及评价方法进行了理论阐述,研究给出了直线光栅尺精度检测试验方法及流程;试验结果表明,1000mm长光栅尺的拼接误差±25nm,最大栅距误差<43nm,累积误差<1μm,验证了精度评价及标定方法的准确性,可用于工程应用。The pitch error and cumulative error of linear scale are two core indicators for measuring the linear displacement reference and measurement accuracy.In order to improve the calibration accuracy of the linear scale and the accuracy of error compensation,the error sources that affect the accuracy of the linear grating scale are analyzed by the grating ruled reticle principle.A method for estimating the pitch error based on minimum area method is proposed.The expression of minimum area method is summarized based on the characteristics of 10 typical grating fringes,and the evaluation method of the minimum area and average linewidth is explained,the calibration and evaluation methods of cumulative error and coefficient of thermal expansion are described theoretically.The principle and process of linear scale accuracy calibration are studied.The test results show that the splicing error of 1000mm long grating ruler is±25nm,the maximum pitch error is less than 43nm,and the cumulative error is<1μm.The accuracy of the calibration method is verified,which can be used for engineering application test accuracy.

关 键 词：直线位移测量 玻璃光栅尺 精度标定 栅距误差 最小区域法 

分 类 号：TH162[机械工程—机械制造及自动化] TG506[金属学及工艺—金属切削加工及机床]