基于纳米森林的电容式湿度传感器  

Capacitive Humidity Sensor Based on Nano-Forest

作　　者：陈贵东 石梦 毛海央[3,4] 熊继军 陈大鹏[3,4] Chen Guidong;Shi Meng;Mao Haiyang;Xiong Jijun;Chen Dapeng(Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,North University of China,Taiyuan 030051,China;Shanxi Provincial Key Laboratory of Dynamic Testing Technology,North University of China,Taiyuan 030051,China;Integrated Circuit Advanced Process R&D Center,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Advanced Sensing Department,Wuxi Internet of Things Innovation Center Co.,Ltd.,Wuxi 214001,China)

机构地区：[1]中北大学,仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学,动态测试技术山西省重点实验室,太原030051 [3]中国科学院微电子研究所,集成电路先导工艺研发中心,北京100029 [4]无锡物联网创新中心有限公司先进感知事业部,江苏无锡214001

出　　处：《微纳电子技术》2020年第6期462-467,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61771467,51425505);中国科学院青年创新促进会资助项目(2018153);广东省重点领域研发计划资助项目(2019B010117001)。

摘　　要：提出了一种基于纳米森林的电容式湿度传感器。该湿度传感器利用等离子体技术制备的纳米森林作为湿度敏感层,湿度敏感范围为30%RH^90%RH,且在大于60%RH的湿度范围内灵敏度达到1.87 pF/%RH,同时响应和恢复时间分别约为3.2 s和6 s。当传感器置于湿度环境中时,吸收在纳米森林表面并凝结在表面孔隙中的水分子导致纳米森林介电常数发生变化,进而引起电容值的改变。通过与聚酰亚胺湿度传感器对比,证明基于纳米森林结构的湿度传感器具有更加优异的湿敏性能。此外,该传感器还可作为湿度触发的非接触式开关,有望应用于电梯按键等公共设备上,用于抑制细菌传播。A capacitive humidity sensor based on nano-forest was proposed.The nano-forest prepared by plasma technology was used as humidity-sensitive layer for the humidity sensor.The humidity sensitive range is 30%RH-90%RH,and the sensitivity reaches 1.87 pF/%RH in the humidity range of above 60%RH,the response time and recovery time are about 3.2 s and 6 s,respectively.When the sensor is in a humid environment,the water molecules absorbed on the nano-forest surface and condensed in the surface pores cause the change of dielectric constant of the nano-forest,thereby leading to the change of the capacitance value.Compared with the polyimide humidity sensor,the humidity sensor based on nano-forest has more excellent humidity sensitive performance.In addition,the sensor can also be used as a non-contact switch triggered by humidity,which can be used in public equipment,such as elevator buttons and so on,to suppress the spread of bacteria.

关 键 词：湿度传感器 纳米森林 聚酰亚胺 等离子体 非接触式传感 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]