螺杆真空泵内气体热力过程的解析计算与实验研究  

Analytical Calculation and Experimental Studies on Gas Thermodynamic Processes in Screw Vacuum Pump

作　　者：翟云飞 张世伟[1] 孙坤[1] 赵凡[1] 张志军[1] 韩进[1] 张莉[2] 张永炬[2] ZHAI Yun-fei;ZHANG Shi-wei;SUN Kun;ZHAO Fan;ZHANG Zhi-jun;HAN Jin;ZHANG Li;ZHANG Yong-ju(School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China;College of Aeronautical Engineering,Taizhou University,Taizhou 318000,China)

机构地区：[1]东北大学机械工程与自动化学院,辽宁沈阳110819 [2]台州学院智能制造学院,浙江台州318000

出　　处：《真空》2020年第3期54-60,共7页Vacuum

摘　　要：本文提出了一个描述螺杆真空泵内气体级间返流泄漏量沿程分布的简化模型,基于此模型对螺杆真空泵内的气体热力过程进行深度分析,解析计算了抽气过程的吸气、压缩、输运、反冲和排气各阶段气体热力学参数随时间的变化关系。同时,组建了专门的实验测试台,并制作了采用三段式螺杆转子、泵腔侧壁带有5个压力测试孔的专用测试样泵;通过实际测试极限真空状态下的螺杆泵内沿程气体压力,间接验证了返流泄漏模型和热力学计算的正确性。This paper presents a simplified model describing the distribution of leakage among working chambers in the screw vacuum pump. Based on the model,the gas thermodynamic processes in the screw vacuum pump is analyzed in depth. The thermodynamic parameters of each processes,including sucking process,compressing process,transferring process,backlashing process and exhausting process,which vary with the time are derived. At the same time,a special experimental test bench is set up,and multi-stage gradational screw rotors are adopted,and five pressure test holes on the side of the pump cavity are produced. The actual tests are carried out under the ultimate vacuum condition of the screw vacuum pump. They indirectly verify the correctness of the leakage model and thermodynamic calculations.

关 键 词：螺杆真空泵 热力过程 返流泄漏 

分 类 号：TB752.2[一般工业技术—真空技术]