多波长数字全息计量技术综述  

Review of Multi-Wavelength Digital Holography Metrology

作　　者：张悦萌 蔡萍[1] 隆军 闫浩 Zhang Yuemeng;Cai Ping;Long Jun;Yan Hao(School of Electronic In formation and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学电子信息与电气工程学院,上海200240

出　　处：《激光与光电子学进展》2020年第10期16-27,共12页Laser & Optoelectronics Progress

基　　金：国家重点研发计划项目(2016YFF0200700)。

摘　　要：数字全息测量具有准确度高、非接触和全场测量等优点。单波长数字全息测量主要适用于高度变化在微米级的连续性形貌物体,而基于双波长干涉技术的多波长数字全息技术可测量形貌更复杂、高度方向变化更陡峭的物体,大大扩展了数字全息计量技术的应用范围。近年来,多波长数字全息的研究发展有两个主要方向:一是与实际需求相适应的新的测量方式和/或光路;二是图像处理方面包括降噪、数值重建和相位畸变修正等的新技术新方法,使计算效率和测量准确度得到明显改善。Holding advantages including high accuracy,non-contact measurement,and full-filed measurement,single-wavelength digital holographic systems are generally used for the measurement of micro-scale objects with continuous morphology.Developed from dual-wavelength interferometry techniques,multi-wavelength digital holographic systems can measure objects with complex shapes and larger scales,which extends the application range of digital holographic metrology.In recent years,there are two main research topics in multi-wavelength digital holography area.First,many types of measurement methods and/or optical setup according to realistic requirements are proposed;in addition,enhancement are achieved in image processing techniques such as noise reduction algorithm,numerical reconstruction and phase aberration compensation to improve the computational efficiency and result accuracy.

关 键 词：数字全息术 双波长技术 形貌测量 数字图像处理技术 

分 类 号：O438.1[机械工程—光学工程]