膜厚对FePt薄膜择优取向生长和磁性能的影响  

Effects of Film Thickness on Preferential Orientation Growth and Magnetic Properties of FePt Films

作　　者：何木芬 HE Mufen(Guangxi Key Laboratory of structure-activity relationship for electronic information materials;School of Materials Science and Engineering,Guilin University of Electronic Technology,Guangxi,Guilin 541004,China)

机构地区：[1]桂林电子科技大学广西电子信息材料构效关系重点试验室,广西桂林541004 [2]桂林电子科技大学材料科学与工程学院,广西桂林541004

出　　处：《电工材料》2020年第3期31-34,共4页Electrical Engineering Materials

基　　金：广西自然科学基金(2019GXNSFAA245056);广西信息材料重点试验室基金(191013-Z);桂林电子科技大学研究生教育创新计划资助项目(2018XWYJ24)。

摘　　要：采用直流磁控溅射的方法在Si基片上制备了FePt薄膜,研究了膜厚对FePt薄膜结构与磁性能的影响。结果表明:在600℃热处理1 h,FePt薄膜由无序的面心立方相向有序的面心四方相的转变基本完成;随着膜厚减小至40 nm,在没有缓冲层、不使用有取向衬底、不对基片加热的情况下,表现出明显的(001)择优取向,但膜越薄表面越容易出现空洞。磁性能测试表明,越薄的FePt薄膜的矫顽力越大,40 nm厚的薄膜的矫顽力可达到~15.9 kOe。膜厚的减小对FePt薄膜的择优取向生长和磁性能具有较大的提升作用。In this work,FePt films were prepared on Si substrate by DC magnetron sputtering.The results show that the transformation of FePt film from the disordered face-centered cubic phase to the ordered face-centered tetragonal phase is basically completed after the heat treatment at 600℃for 1 hour.And as the film thickness decreased to 40 nm,in the case of no buffer layer,no oriented substrate,and no substrate heating,it showed obvious(001)preferred orientation.However,the thinner the film,the more likely it was to have cavities.The magnetic property test showed that the thinner the FePt film was,the greater the coercivity was.The coercivity of the 40 nm thick film was^15.9 kOe.The decrease of film thickness can greatly improve the preferential orientation growth and magnetic properties of FePt films,which is of great significance to the development of magnetic recording films.

关 键 词：FePt薄膜 相转变 择优取向 磁性能 

分 类 号：TM27[一般工业技术—材料科学与工程]