硅基超材料太赫兹波电光调制器  

Silicon-based Metamaterial Terahertz Wave Electro-optic Modulator

作　　者：胡广尧 文天龙 张怀武[1] HU Guangyao;WEN Tianlong;ZHANG Huaiwu(State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China)

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《压电与声光》2020年第3期299-302,共4页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划基金资助项目(NO.2018YFE0115500);国家自然科学基金资助项目(NO.51772045);四川省科技计划基金资助项目(NO.2019YJ0186)。

摘　　要：该文基于超材料结构设计制造并表征了一款工作在0.34 THz频率下的太赫兹电光调制器。该调制器通过超材料结构加载电压,从而在超材料结构开口处获得强电场用以输运恒定激光照射下硅基产生的光生载流子。通过电压调制信号调制太赫兹波,实现了调制深度从9%增加到50%,其调制速度达到30 kHz。Based on the metamaterial structure,a terahertz electro-optic modulator operating at the frequency of 0.34 THz is designed,manufactured and characterized in this paper.The modulator loads voltages through the metamaterial structure and obtains a strong electric field at the opening of the metamaterial structure to transport the photon-generated carrier generated by the silicon under constant laser irradiation.By modulating terahertz waves with the voltage modulation signals,the modulation depth is increased from 9%to 50%,and the modulation speed is up to 30 kHz.

关 键 词：太赫兹 超材料 电光调制器 调制深度 调制速度 

分 类 号：TN761[电子电信—电路与系统] TB34[一般工业技术—材料科学与工程]